Growth and characterization of ultrathin nitrided silicon oxide films
1999 ◽
Vol 43
(3)
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pp. 265-286
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1994 ◽
Vol 141
(1)
◽
pp. 259-263
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Keyword(s):
2016 ◽
Vol 54
◽
pp. 20-28
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1999 ◽
Vol 17
(5)
◽
pp. 2753-2758
◽
1992 ◽
Vol 279
(1-2)
◽
pp. 119-126
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