p-Type Conversion of ZnO Thin Films by Plasma Immersion Ion Implantation

Electrochemical and Solid-State Letters ◽

10.1149/1.3156835 ◽

2009 ◽

Vol 12 (9) ◽

pp. H329 ◽

Author(s):

Shuyu Zhang ◽

Rongqing Liang ◽

Qiongrong Ou ◽

Xiaojing Wu ◽

Meifu Jiang ◽

...

Keyword(s):

Ion Implantation ◽

Zno Thin Films ◽

Type Conversion ◽

Plasma Immersion Ion Implantation ◽

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Realization of reliable p-type ZnO thin films by nitrogen implantation using plasma immersion ion implantation

Superlattices and Microstructures ◽

10.1016/j.spmi.2014.07.010 ◽

2014 ◽

Vol 75 ◽

pp. 9-16 ◽

Author(s):

S. Nagar ◽

S. Chakrabarti

Keyword(s):

Ion Implantation ◽

Zno Thin Films ◽

Nitrogen Implantation ◽

Plasma Immersion Ion Implantation ◽

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P-type ZnO thin films achieved by N+ ion implantation through dynamic annealing process

Applied Physics Letters ◽

10.1063/1.4751467 ◽

2012 ◽

Vol 101 (11) ◽

pp. 112101 ◽

Author(s):

M. A. Myers ◽

M. T. Myers ◽

M. J. General ◽

J. H. Lee ◽

L. Shao ◽

...

Keyword(s):

Ion Implantation ◽

Annealing Process ◽

Zno Thin Films ◽

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Evidence of strong acceptor peaks in ZnO thin films doped with phosphorus by plasma immersion ion implantation technique

Journal of Luminescence ◽

10.1016/j.jlumin.2012.12.043 ◽

2013 ◽

Vol 137 ◽

pp. 55-58 ◽

Author(s):

S. Nagar ◽

S. Chakrabarti

Keyword(s):

Ion Implantation ◽

Zno Thin Films ◽

Implantation Technique ◽

Plasma Immersion Ion Implantation

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Fabrication and characteristics of the low resistivity p-type ZnO thin films by nitrogen ion implantation

10.7567/ssdm.2007.p-8-14 ◽

2007 ◽

Author(s):

Shu-Yi Tsai ◽

Yang-Ming Lu ◽

Min-Hsiung Hon

Keyword(s):

Ion Implantation ◽

Zno Thin Films ◽

Nitrogen Ion Implantation ◽

Low Resistivity ◽

Nitrogen Ion ◽

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Fabrication of high hole-carrier density p-type ZnO thin films by N–Al co-doping

Applied Surface Science ◽

10.1016/j.apsusc.2006.08.010 ◽

2007 ◽

Vol 253 (8) ◽

pp. 3825-3827 ◽

Author(s):

Zhang Xiaodan ◽

Fan Hongbing ◽

Zhao Ying ◽

Sun Jian ◽

Wei Changchun ◽

...

Keyword(s):

Carrier Density ◽

Zno Thin Films ◽

Co Doping ◽

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Diverse Amorphous Carbonaceous Thin Films Obtained by Plasma Enhanced Chemical Vapor Deposition and Plasma Immersion Ion Implantation and Deposition

Physics Procedia ◽

10.1016/j.phpro.2012.03.517 ◽

2012 ◽

Vol 32 ◽

pp. 48-57 ◽

Author(s):

R.M. Santos ◽

R. Turri ◽

E.C. Rangel ◽

N.C. da Cruz ◽

W. Schreiner ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Ion Implantation ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Immersion Ion Implantation

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Effects of diffusion temperature and diffusion time on fabrication of Na-diffused p-type ZnO thin films

Materials Letters ◽

10.1016/j.matlet.2012.04.092 ◽

2012 ◽

Vol 80 ◽

pp. 175-177 ◽

Author(s):

Huibin Liu ◽

Xinhua Pan ◽

Ping Ding ◽

Zhizhen Ye ◽

Haiping He ◽

...

Keyword(s):

Diffusion Time ◽

Zno Thin Films ◽

Diffusion Temperature ◽

P Type ◽

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P-type ZnO thin films via phosphorus doping

10.1117/12.785467 ◽

2008 ◽

Author(s):

D. P. Norton ◽

H. S. Kim ◽

J. M Erie ◽

S. J. Pearton ◽

Y. L. Wang ◽

...

Keyword(s):

Zno Thin Films ◽

Phosphorus Doping ◽

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Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽

10.1016/s1001-0521(07)60055-2 ◽

2006 ◽

Vol 25 (6) ◽

pp. 110-114 ◽

Author(s):

C LEE ◽

J LIM ◽

S PARK ◽

H KIM

Keyword(s):

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Zno Thin Films ◽

Nitrogen Doped ◽

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Highly stable non-polar p-type Ag-doped ZnO thin films grown on r-cut sapphire

Materials Letters ◽

10.1016/j.matlet.2013.02.115 ◽

2013 ◽

Vol 100 ◽

pp. 78-81 ◽

Author(s):

M.A. Myers ◽

J.H. Lee ◽

H. Wang

Keyword(s):

Zno Thin Films ◽

Doped Zno ◽

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