(3-Aminopropyl)trimethoxysilane Self-Assembled Monolayer as Barrier of Porous SiOCH for Electroless Cu Metallization: Optimizations of SiOCH Hydroxylation and Monolayer Functionalization
2021 ◽
Vol 10
(2)
◽
pp. 023003
2015 ◽
Vol 135
(2)
◽
pp. 168-173
◽
Keyword(s):
2019 ◽
Keyword(s):
2017 ◽
Vol 88
◽
pp. 196-203
◽
Keyword(s):