Chemical Vapor Deposition Epitaxy of Silicon and Silicon-Carbon Alloys at High Rates and Low Temperatures using Neopentasilane

ECS Meeting Abstracts ◽

10.1149/ma2007-01/12/606 ◽

2007 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

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Chemical Vapor Deposition Epitaxy of Silicon and Silicon-Carbon Alloys at High Rates and Low Temperatures using Neopentasilane

ECS Transactions ◽

10.1149/1.2727429 ◽

2019 ◽

Vol 6 (1) ◽

pp. 429-436 ◽

Author(s):

James C. Sturm ◽

Keith H. Chung ◽

N. Yao ◽

E. Sanchez ◽

K. K. K. Singh ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

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Remote hydrogen plasma chemical vapor deposition from alkylsilane and alkylcarbosilane single-sources: Mechanism of the process and properties of resulting silicon-carbon deposits

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2001388 ◽

2001 ◽

Vol 11 (PR3) ◽

pp. Pr3-691-Pr3-702

Author(s):

A. M. Wrobel

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Hydrogen Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Carbon Deposits ◽

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Novel Synthesis of Silicon/Carbon Nanotubes Microspheres as Anode Additives Through Chemical Vapor Deposition in Fluidized Bed Reactors

SSRN Electronic Journal ◽

10.2139/ssrn.3659826 ◽

2020 ◽

Author(s):

Hong Zhao ◽

Ning TU ◽

Weibin Zhang ◽

Min Zhang ◽

Jian Wang

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Fluidized Bed ◽

Vapor Deposition ◽

Chemical Vapor ◽

Fluidized Bed Reactors ◽

Novel Synthesis ◽

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Characterization of Undoped, N- and P-Type Hydrogenated Nanocrystalline Silicon Carbide Films Deposited by Hot-Wire Chemical Vapor Deposition at Low Temperatures

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1415 ◽

2007 ◽

Vol 46 (4A) ◽

pp. 1415-1426 ◽

Author(s):

Shinsuke Miyajima ◽

Akira Yamada ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Nanocrystalline Silicon Carbide ◽

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Amorphous silicon–carbon nanospheres synthesized by chemical vapor deposition using cheap methyltrichlorosilane as improved anode materials for Li-ion batteries

Nanoscale ◽

10.1039/c3nr00635b ◽

2013 ◽

Vol 5 (12) ◽

pp. 5384 ◽

Author(s):

Zailei Zhang ◽

Meiju Zhang ◽

Yanhong Wang ◽

Qiangqiang Tan ◽

Xiao Lv ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Anode Materials ◽

Chemical Vapor ◽

Li Ion Batteries ◽

Carbon Nanospheres ◽

Silicon Carbon ◽

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Effect of thermodynamic parameters on properties of silicon-carbon films prepared by radio-frequency plasma-enhanced chemical vapor deposition for anti-reflective and photo-luminescent coatings

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001052 ◽

2021 ◽

Vol 39 (4) ◽

pp. 042203

Author(s):

William W. Hernández-Montero ◽

Adrián Itzmoyotl-Toxqui ◽

Carlos Zúñiga-Islas

Keyword(s):

Chemical Vapor Deposition ◽

Thermodynamic Parameters ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Radio Frequency Plasma ◽

Silicon Carbon ◽

Frequency Plasma ◽

Photo Luminescent ◽

Luminescent Coatings

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Improvement of synthesized graphene structure through various solvent liquids at low temperatures by chemical vapor deposition method

Materials Science and Engineering B ◽

10.1016/j.mseb.2021.115458 ◽

2021 ◽

Vol 274 ◽

pp. 115458

Author(s):

Najmeh Koosha ◽

Javad Karimi-Sabet ◽

Mohammad Ali Moosavian ◽

Younes Amini

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method

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Preparation of Hydrogenated Amorphous Silicon Carbon Nitride Films by Hot-Wire Chemical Vapor Deposition Using Hexamethyldisilazane for Silicon Solar Cell Applications

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.56 ◽

2007 ◽

Vol 46 (1) ◽

pp. 56-59 ◽

Author(s):

Amornrat Limmanee ◽

Michio Otsubo ◽

Takehiko Sato ◽

Shinsuke Miyajima ◽

Akira Yamada ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Nitride ◽

Silicon Solar Cell ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Hot Wire ◽

Silicon Carbon ◽

Hydrogenated Amorphous

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Preparation of Epitaxial MgB2 Thick Films at Low Temperatures by Using Hybrid Physical-Chemical Vapor Deposition

Journal of the Korean Physical Society ◽

10.3938/jkps.51.1743 ◽

2007 ◽

Vol 51 (5) ◽

pp. 1743-1747 ◽

Author(s):

J. Y. Huh ◽

W. K. Seong ◽

T. G. Lee ◽

W. N. Kang ◽

N. K. Yang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Thick Films ◽

Chemical Vapor ◽

Physical Chemical

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Growth of Single-Walled Carbon Nanotubes by Hot-Filament Chemical Vapor Deposition at Low Temperatures Using Double-Layer Film Consisting of Nickel and Cobalt Layers as Catalyst

Hyomen Kagaku ◽

10.1380/jsssj.34.346 ◽

2013 ◽

Vol 34 (7) ◽

pp. 346-351

Author(s):

Yutaka ISHIKAWA ◽

Tomohiro UENO ◽

Ryo HARUTA

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Double Layer ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Single Walled Carbon Nanotubes ◽

Single Walled Carbon ◽

Hot Filament ◽

Walled Carbon Nanotubes

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