Servo Control Design of a Micro/Nano Positioning Stage Using FPGA Based Embedded Hardware
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2009 ◽
Vol 15
(3)
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pp. 369-389
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2013 ◽
Vol 26
(7)
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pp. 252-260
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2003 ◽
Vol 46
(3)
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pp. 819-827
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2007 ◽
Vol 158
(20)
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pp. 2288-2305
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