Processing Research of Complex Terrain Waters Single Beam Reverberation Data

2021 ◽  
Vol 09 (04) ◽  
pp. 132-138
Author(s):  
广洲 杨
Keyword(s):  
Author(s):  
С.А. Лутков ◽  
А.В. Тезиков

Работа посвящена изучению влияния формы отражающей поверхности на результаты картографирования дна и съемки подводных объектов гидроакустическими средствами. Проведена сравнительная оценка качества картирования дна однолучевыми эхолотами и многолучевыми эхолотами. Опыт применения гидроакустических средств измерения глубины показывает, что в районах с выровненным рельефом глубины, измеряемые однолучевыми эхолотами, многолучевыми эхолотами, интерферометрическими эхолотами и механическими лотами, совпадают. В районах со сложным рельефом глубины, измеренные однолучевыми эхолотами, превышают глубины, измеренные многолучевыми эхолотами, и сильно варьируются. Разработана математическая модель для исследования искажений отображения гидролокатора донной поверхности в зависимости от кривизны отражающей поверхности. Получены аналитические зависимости, позволяющие восстановить форму отражающей поверхности по результатам гидроакустических измерений. The work is devoted to the study of the influence of the shape of the reflecting surface on the results of bottom mapping and underwater objects survey using hydro acoustic means. A comparative assessment of the quality of bottom mapping performed by single-beam echo sounders and multi-beam echo sounders was performed. The experience of using hydro acoustic depth measurement tools shows that in areas with leveled terrain, the depths measured by single-beam echo sounders, multi-beam echo sounders, interferometric echo sounders and mechanical lots coincide. In areas with complex terrain, the depths measured by single-beam echo sounders exceed the depths measured by multi-beam echo sounders, and vary greatly. A mathematical model is developed for studying the distortions of the bottom surface sonar display depending on the curvature of the reflecting surface. Analytical dependences are obtained that allow us to restore the shape of the reflecting surface based on the results of sonar measurements.


2008 ◽  
Author(s):  
Yuankun Lin ◽  
Ahmad Harb ◽  
Daniel Rodriguez ◽  
Karen Lozano ◽  
Di Xu ◽  
...  

Author(s):  
Valery Ray ◽  
Josef V. Oboňa ◽  
Sharang Sharang ◽  
Lolita Rotkina ◽  
Eddie Chang ◽  
...  

Abstract Despite commercial availability of a number of gas-enhanced chemical etches for faster removal of the material, there is still lack of understanding about how to take into account ion implantation and the structural damage by the primary ion beam during focused ion beam gas-assisted etching (FIB GAE). This paper describes the attempt to apply simplified beam reconstruction technique to characterize FIB GAE within single beam width and to evaluate the parameters critical for editing features with the dimensions close to the effective ion beam diameter. The approach is based on reverse-simulation methodology of ion beam current profile reconstruction. Enhancement of silicon dioxide etching with xenon difluoride precursor in xenon FIB with inductively coupled plasma ion source appears to be high and relatively uniform over the cross-section of the xenon beam, making xenon FIB potentially suitable platform for selective removal of materials in circuit edit application.


Author(s):  
Qiang Gao ◽  
Mark Zhang ◽  
Ming Li ◽  
Chorng Niou ◽  
W.T. Kary Chien

Abstract This paper examines copper-interconnect integrated circuit transmission electron microscope (TEM) sample contamination. It investigates the deterioration of the sample during ion milling and storage and introduces prevention techniques. The paper discusses copper grain agglomeration issues barrier/seed step coverage checking. The high temperature needed for epoxy solidifying was found to be harmful to sidewall coverage checking of seed. Single beam modulation using a glass dummy can efficiently prevent contamination of the area of interest in a TEM sample during ion milling. Adoption of special low-temperature cure epoxy resin can greatly reduce thermal exposure of the sample and prevent severe agglomeration of copper seed on via sidewall. TEM samples containing copper will deteriorate when stored in ordinary driers and sulphur contamination was found at the deteriorated point on the sample. Isolation of the sample from the ambient atmosphere has been verified to be very effective in protecting the TEM sample from deterioration.


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