Structural properties of hydrogenated amorphous silicon nitride films deposited by facing targets sputtering
2010 ◽
Vol 55
(18)
◽
pp. 1799-1804
◽
1985 ◽
Vol 24
(Part 2, No. 11)
◽
pp. L861-L863
◽
1992 ◽
Vol 31
(Part 1, No. 2A)
◽
pp. 176-180
◽
2008 ◽
Vol 18
(8)
◽
pp. 085001
◽