Elastic modulus measurement of multilayer metallic thin films
1999 ◽
Vol 14
(5)
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pp. 1996-2001
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Keyword(s):
The One
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Two- and three-layer composite models were developed using a beam vibration theory, and the models were applied for measuring Young's moduli of thin metallic films. The Cr, Ni, and Co-coated Si wafer composites (two-layer composite) and (Cr/Ti/Si) composites (three-layer composite) were produced by radio-frequency (rf) magnetron sputtering and used to test the developed models. Young's moduli of (Cr) films obtained by the three-layer composite model agree well with those of (Cr) films obtained by the two-layer composite model, considering (Ti/Si) as the one layer and (Cr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly.
Keyword(s):
2007 ◽
Vol 122
(2)
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pp. 1090-1101
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Keyword(s):
2011 ◽
Vol 9
(69)
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pp. 689-700
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Keyword(s):
1961 ◽
Vol 57
(3)
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pp. 606-622
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1997 ◽
Vol 83
(6)
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pp. 1814-1821
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Keyword(s):
Keyword(s):
2011 ◽
Vol 53
(8)
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pp. 606-616
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Keyword(s):