Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE
Keyword(s):
ABSTRACTIn this paper we present a novel method of nonlinear macro model of a cantilever for mixed domain simulation only with SPICE. Based on lumped elements of equivalent circuits a model is developed, which realizes a coupled electro-thermal-mechanical simulation including crosstalk effects. The model is verified with measurement and helps to class and solve crosstalk. With SPICE as electrical circuit simulator the cantilever array could be simulate in conjunction with the excitations and analysis electronics more detailed like the system level models and faster like FEM-simulation.
2019 ◽
Vol 2019
◽
pp. 1-13
◽
Keyword(s):
2016 ◽
Vol 31
(2)
◽
pp. 740-749
◽
2009 ◽
Vol 60-61
◽
pp. 213-218
2016 ◽
Vol 14
(1)
◽
pp. 21
◽
Keyword(s):
2013 ◽
Vol 64
(2)
◽
pp. 118-122
◽
Keyword(s):
2013 ◽
Vol 48
(21)
◽
pp. 7603-7612
◽