Single Crystal Boron-Doped Diamond Synthesis
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AbstractThe electrical characteristics of high quality single crystal boron-doped diamond are studied. Samples are synthesized in a high power-density microwave plasma-assisted chemical vapor deposition (CVD) reactor at pressures of 130-160 Torr. The boron-doped diamond films are grown using diborane in the feedgas at concentrations of 1 to 50 ppm. The boron acceptor concentration is investigated using infrared absorption and a four point probe is used to study the conductivity. The temperature dependent conductivity is analyzed to determine the boron dopant activation energy.
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2010 ◽
Vol 25
(3)
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pp. 444-457
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1998 ◽
Vol 7
(1)
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pp. 88-95
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2008 ◽
Vol 17
(7-10)
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pp. 1320-1323
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2009 ◽
Vol 18
(5-8)
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pp. 704-706
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