Characterization of the DFZ in Silicon Wafers by a Non-Destructive Technique

1986 ◽  
Vol 69 ◽  
Author(s):  
J. M. Borrego ◽  
R. J. Gutmann ◽  
N. Jensen ◽  
C. S. Lo ◽  
O. Paz
Keyword(s):  
Experimental Observation ◽  
Light Pulse ◽  
Computer Model ◽  
Surface Passivation ◽  
Silicon Wafers ◽  
Free Zone ◽  
Microwave Reflection ◽  
The Creation ◽  
Non Destructive

AbstractThis paper presents a non-destructive technique for characterizing The Defect Free Zone (DFZ) of silicon wafers. The method consists in measuring the decay of microwave reflection following the creation of excess carriers by a light pulse. For wafers with similar surface passivation we have found a direct correlation between the transient duration and the size of the DFZ. A computer model of the microwave reflection in silicon wafers with different size of DFZ agrees with experimental observation.

Non-destructive lifetime measurement in silicon wafers by microwave reflection

1987 ◽  
Vol 30 (2) ◽  
pp. 195-203 ◽  
Author(s):  
J.M. Borrego ◽  
R.J. Gutmann ◽  
N. Jensen ◽  
O. Paz
Keyword(s):  
Lifetime Measurement ◽  
Silicon Wafers ◽  
Microwave Reflection ◽  
Non Destructive

Characterization of Denuded Zones in Silicon Wafers

1984 ◽  
Vol 36 ◽  
Author(s):  
H. J. Rath ◽  
J. Reffle ◽  
D. Huber ◽  
P. Eichinger ◽  
F. Iberl ◽  
...  
Keyword(s):  
Collection Efficiency ◽  
Depth Profiling ◽  
Relevant Information ◽  
Silicon Wafers ◽  
Alpha Particles ◽  
Soft Error ◽  
Layered System ◽  
Error Performance ◽  
Free Zone

ABSTRACTDifferent techniques are presented for the characterization of the two-layered system consisting of a precipitate-free zone and a precipitated zone, generated in CZ-grown silicon wafers by thermal processing. The diffusion length profile can be determined by surface photovoltage characteristics; measurements of the collection efficiency for excess carriers generated by alpha particles gives relevant information about the soft error performance. Finally, oxygen depth profiling by SIMS is discussed. Results are shown and compared with damage patterns obtained from cleavage face etching.

Non Destructive Electrical Defect Characterisation and Topography of Silicon Wafers and Epitaxial Layers

2005 ◽  
Vol 864 ◽  
Author(s):  
K. Dornich ◽  
T. Hahn ◽  
J.R. Niklas
Keyword(s):  
Diffusion Length ◽  
High Sensitivity ◽  
Silicon Wafers ◽  
Charge Carriers ◽  
Epitaxial Layers ◽  
Thermal Excitation ◽  
Non Destructive ◽  
And Diffusion ◽  
Defect Characterisation

AbstractRecent progress in experimental technique made it possible to improve the sensitivity of microwave detected photoconductivity by several orders of magnitude. This opens completely new possibilities for a contact less non-destructive electrical defect characterization of silicon wafers and even of epitaxial layers on substrates with extremely low resistivity. Electrical properties such as lifetime, mobility and diffusion length can be measured without contacts also at very low injection levels with a resolution only limited by the diffusion length of the charge carriers. The doping level of the material plays no major role.Owing to the high sensitivity, thermal excitation of charge carriers out of defect levels filled during the photo pulse can also be observed. This leads to defect specific photoconductivity transients which deliver pieces of information like DLTS, however, again without contacts, non critical doping, and with high spatial resolution.

CHARACTERIZATION OF RELIGIOUS STYLE AS A FUNCTIONAL STYLE IN LINGUISTICS

2020 ◽  
Vol 1 (3) ◽  
pp. 236-242
Author(s):  
Barnokhon Kushakova ◽  
Keyword(s):  
Social Life ◽  
Religious Language ◽  
Religious Texts ◽  
World Outlook ◽  
The People ◽  
The Social ◽  
Functional Features ◽  
The Creation

This article discusses the conditions, reasons and factors of characterization of religious style as a functional style in the field of linguistics. In addition, religious style and its main peculiarities, its importance in the social life, and the functional features of religious style are highlighted in the article. As a result of our investigation, the following results were obtained: a) the increase in the need for the creation and significance of religious language, particularly religious texts has been scientifically proved; b) the possibility of religious texts to represent the thoughts of the people, culture and world outlook has been verified; c) the specificity of religious language, religious texts has been revealed; d) the development of religious style as a functional style has been grounded.

ART STUDIOS – A WAY TO DEVELOPE CHILDREN’S IMAGINATION

2020 ◽  
Vol 11 (1) ◽  
pp. 144-148
Author(s):  
Liuba Zlatkova ◽  
Keyword(s):  
Fairy Tale ◽  
Psychological Effects ◽  
Complete Product ◽  
The Arts ◽  
The Creation ◽  
Role Of Parents

The report describes the steps for creating a musical tale by children in the art studios of „Art Workshop“, Shumen. These studios are led by students volunteers related to the arts from pedagogical department of Shumen University, and are realized in time for optional activities in the school where the child studies. The stages of creating a complete product with the help of different arts are traced – from the birth of the idea; the creation of a fairy tale plot by the children; the characterization of the fairy-tale characters; dressing them in movement, song and speech; creating sets and costumes and creating a finished product to present on stage. The role of parents as a link and a necessary helper for children and leaders is also considered, as well as the positive psychological effects that this cooperation creates.

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