scholarly journals Demonstration of real-time monitoring of a photolithographic exposure process using chemical ionization mass spectrometry

1998 ◽  
Author(s):  
C.D. Mowry
Keyword(s):  
Mass Spectrometry ◽  
Real Time ◽  
Chemical Ionization ◽  
Ionization Mass Spectrometry ◽  
Chemical Ionization Mass Spectrometry ◽  
Ionization Mass ◽  
Real Time Monitoring ◽  
Exposure Process

scholarly journals Real-time measurements of gas-phase organic acids using SF<sub>6</sub><sup>−</sup> chemical ionization mass spectrometry

2018 ◽  
Vol 11 (9) ◽  
pp. 5087-5104 ◽  
Author(s):  
Theodora Nah ◽  
Yi Ji ◽  
David J. Tanner ◽  
Hongyu Guo ◽  
Amy P. Sullivan ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Organic Acids ◽  
Organic Acid ◽  
Real Time ◽  
Gas Phase ◽  
Chemical Ionization ◽  
Ionization Mass Spectrometry ◽  
Chemical Ionization Mass Spectrometry ◽  
Rural Site ◽  
Ionization Mass

Abstract. The sources and atmospheric chemistry of gas-phase organic acids are currently poorly understood, due in part to the limited range of measurement techniques available. In this work, we evaluated the use of SF6- as a sensitive and selective chemical ionization reagent ion for real-time measurements of gas-phase organic acids. Field measurements are made using chemical ionization mass spectrometry (CIMS) at a rural site in Yorkville, Georgia, from September to October 2016 to investigate the capability of this measurement technique. Our measurements demonstrate that SF6- can be used to measure a range of organic acids in the atmosphere. One-hour averaged ambient concentrations of organic acids ranged from a few parts per trillion by volume (ppt) to several parts per billion by volume (ppb). All the organic acids displayed similar strong diurnal behaviors, reaching maximum concentrations between 17:00 and 19:00 EDT. The organic acid concentrations are dependent on ambient temperature, with higher organic acid concentrations being measured during warmer periods.

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