Low Temperature Deposition of Cu Thin Film on Polyimide Using RF-driven Atmospheric Pressure Plasma Jet in Nitrogen Atmosphere
2013 ◽
Vol 26
(4)
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pp. 549-554
◽
Peng Zhao
◽
Wei Zheng
◽
Yuedong Meng
◽
Masaaki Nagatsu
2019 ◽
Vol 33
(5)
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pp. 255-264
Kow-Ming Chang
◽
Shih-Syuan Huang
◽
Chun-Hu Cheng
2009 ◽
Vol 37
(7)
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pp. 1127-1128
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Chun Huang
◽
Wen-Tung Hsu
◽
Chi-Hung Liu
◽
Shin-Yi Wu
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Shih-Hsien Yang
◽
...
2011 ◽
Vol 39
(2)
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pp. 815-821
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Georg Daeschlein
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Sebastian Scholz
◽
Thomas von Woedtke
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Maria Niggemeier
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Eckhard Kindel
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...
2014 ◽
Vol 50
(9)
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pp. 706-708
◽
Chien‐Hung Wu
◽
Hau‐Yuan Huang
◽
Shui‐Jinn Wang
◽
Kow‐Ming Chang
◽
Hsin‐Yu Hsu
2015 ◽
Vol 13
(2)
◽
pp. 241-252
◽
Charlie P. Stallard
◽
Pavel Solar
◽
Hynek Biederman
◽
Denis P. Dowling
2019 ◽
Vol 22
(2)
◽
pp. 025503
◽
Qunxia ZHANG
◽
Cao FANG
◽
Zhu CHEN
◽
Qing HUANG
2019 ◽
Vol 114
(25)
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pp. 254106
◽
Wenjie Fu
◽
Chaoyang Zhang
◽
Cong Nie
◽
Xiaoyun Li
◽
Yang Yan
2015 ◽
Vol 12
(4)
◽
pp. 362-371
◽
Wei-Chun Ma
◽
Chin-Ho Lin
◽
Chun Huang
2020 ◽
Vol 1697
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pp. 012044
N A Ashurbekov
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K M Giraev
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G Sh Shakhsinov
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E Kh Israpov
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Z M Isaeva
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...