Mô hình hoá và mô phỏng quá trình tạo màng Al2O3 bằng phún xạ Magnetron = Modeling and simulation of the magnetron sputtering process for Al2O3 thin film coating.

2007 ◽  
Vol 10 (3) ◽  
Author(s):  
Phúc Giang Văn ◽  
Tuấn Hùng Vũ Lê ◽  
Đạt Thành Huỳnh ◽  
Đến Văn Nguyễn
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Modeling And Simulation ◽  
Film Coating ◽  
Thin Film Coating ◽  
Al2o3 Thin Film

Thin-film coating of vibro-fluidized microparticles via R. F. Magnetron sputtering

2018 ◽  
Author(s):  
Benjamin Garrett ◽  
Mathew Zablocki ◽  
Mark S. Mirotznik ◽  
Nicholas Hudak ◽  
Ahmed S. Sharkawy ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Film Coating ◽  
Thin Film Coating

Nanocrystalline high-entropy alloy (CoCrFeNiAl0.3) thin-film coating by magnetron sputtering

2017 ◽  
Vol 638 ◽  
pp. 383-388 ◽  
Author(s):  
Weibing Liao ◽  
Si Lan ◽  
Libo Gao ◽  
Hongti Zhang ◽  
Shang Xu ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Film Coating ◽  
High Entropy Alloy ◽  
Thin Film Coating ◽  
High Entropy
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