VIS-NIR LED Illumination in Backside Circuit Edit and Optical Probing Applications

Author(s):  
Shida Tan ◽  
Richard H. Livengood ◽  
Dane Scott ◽  
Roy Hallstein ◽  
Pat Pardy ◽  
...  

Abstract High resolution optical imaging is critical in assisting backside circuit edit (CE) and optical probing navigation. In this paper, we demonstrated improved optical image quality using VIS-NIR narrow band light emitting diode (LED) illumination in various FIB and optical probing platforms. The proof of concept was demonstrated with both common non-contact air gap lenses and solid immersion lenses (SIL).

2018 ◽  
Vol 4 (11) ◽  
pp. 133
Author(s):  
HyungTae Kim ◽  
EungJoo Ha ◽  
KyungChan Jin ◽  
ByungWook Kim

A system for inspecting flat panel displays (FPDs) acquires scanning images using multiline charge-coupled device (CCD) cameras and industrial machine vision. Optical filters are currently installed in front of these inspection systems to obtain high-quality images. However, the combination of optical filters required is determined manually and by using empirical methods; this is referred to as passive color control. In this study, active color control is proposed for inspecting FPDs. This inspection scheme requires the scanning of images, which is achieved using a mixed color light source and a mixing algorithm. The light source utilizes high-power light emitting diodes (LEDs) of multiple colors and a communication port to dim their level. Mixed light illuminates an active-matrix organic light-emitting diode (AMOLED) panel after passing through a beam expander and after being shaped into a line beam. The image quality is then evaluated using the Tenenbaum gradient after intensity calibration of the scanning images. The dimming levels are determined using the simplex search method which maximizes the image quality. The color of the light was varied after every scan of an AMOLED panel, and the variation was iterated until the image quality approached a local maximization. The number of scans performed was less than 225, while the number of dimming level combinations was 20484. The proposed method can reduce manual tasks in setting-up inspection machines, and hence is useful for the inspection machines in FPD processes.


Endoscopy ◽  
2016 ◽  
Vol 48 (10) ◽  
pp. 934-938 ◽  
Author(s):  
Sho Sasaki ◽  
Jun Nishikawa ◽  
Hideo Yanai ◽  
Munetaka Nakamura ◽  
Junichi Nishimura ◽  
...  

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 866 ◽  
Author(s):  
Shinta Mariana ◽  
Gregor Scholz ◽  
Feng Yu ◽  
Agus Budi Dharmawan ◽  
Iqbal Syamsu ◽  
...  

Pinhole‐shaped light‐emitting diode (LED) arrays with dimension ranging from 100 μm down to 5 μm have been developed as point illumination sources. The proposed microLED arrays, which are based on gallium nitride (GaN) technology and emitting in the blue spectral region (λ = 465 nm), are integrated into a compact lensless holographic microscope for a non‐invasive, label‐free cell sensing and imaging. From the experimental results using single pinhole LEDs having a diameter of 90 μm, the reconstructed images display better resolution and enhanced image quality compared to those captured using a commercial surface‐mount device (SMD)‐based LED.


2011 ◽  
Vol 480-481 ◽  
pp. 1373-1377 ◽  
Author(s):  
Xiao Ming Zhao ◽  
Xiao Yuan Zhou ◽  
Sheng Chun Yuan

This paper compares and analyzes various common sub-pixels layouts in the outdoor LED (Light Emitting Diode) display industry. According to the basic principles of chromatics and the instructions about central wavelength of LED lamps, proposed that the ratio (2:1:1) of the red, green, blue lamps in one display unit of the 4-subpixels arrangement should be changed to 1:2:1 to improve the clarity of the screen. Besides, to solve the chaotic situation of relating technologies, the paper proposed that optimizing technologies of image quality around LED screen can be classified into two groups based on sub-pixels layouts---centralizing and dispersing evenly.


2000 ◽  
Author(s):  
Wilhelm Graupner ◽  
Christian M. Heller ◽  
Amalkumar P. Ghosh ◽  
Webster E. Howard

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