VIS-NIR LED Illumination in Backside Circuit Edit and Optical Probing Applications
Keyword(s):
Air Gap
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Abstract High resolution optical imaging is critical in assisting backside circuit edit (CE) and optical probing navigation. In this paper, we demonstrated improved optical image quality using VIS-NIR narrow band light emitting diode (LED) illumination in various FIB and optical probing platforms. The proof of concept was demonstrated with both common non-contact air gap lenses and solid immersion lenses (SIL).
2016 ◽
Vol 24
(2)
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pp. 110-116
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Keyword(s):
2007 ◽
Vol E90-C
(5)
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pp. 1021-1026
Keyword(s):
2011 ◽
Vol 480-481
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pp. 1373-1377
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Keyword(s):
2007 ◽
Vol 164
(2)
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pp. 292-298
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