Combining Current Imaging, EBIC/EBAC, and Electrical Probing for Fast and Reliable In-Situ Electrical Fault Isolation
Abstract Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The recently implemented Current Imaging technique is used to quickly image large arrays of contacts providing a means of locating faults.
2005 ◽
pp. 419-428
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2018 ◽
Vol 78
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pp. 493-498
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2004 ◽
Vol 129
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pp. 238-245
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2017 ◽
Vol 17
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pp. 279-284
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