scholarly journals The Effect of Excited Species on the Collisional Energy of Argon Inductively Coupled Plasmas: A Global Model Study

Plasma ◽  
2022 ◽  
Vol 5 (1) ◽  
pp. 30-43
Author(s):  
Júlia Karnopp ◽  
Bernardo Magaldi ◽  
Julio Sagás ◽  
Rodrigo Pessoa
Keyword(s):  
Energy Balance ◽  
Energy Loss ◽  
Electron Temperature ◽  
Global Model ◽  
Balance Equations ◽  
Plasma Parameters ◽  
Collisional Energy Loss ◽  
Inductively Coupled ◽  
Collisional Energy ◽  
Excited Species

Global modeling of inductively coupled plasma (ICP) reactors is a powerful tool to investigate plasma parameters. In this article, the argon ICP global model is revisited to explore the effect of excited species on collisional energy through the study of different approaches to particle and energy balance equations. The collisional energy loss is much more sensitive to modifications in the balance equations than the electron temperature. According to the simulations, the multistep ionization reduces the collisional energy loss in all investigated reaction sets and the inclusion of heavy species reactions has negligible influence. The plasma parameters obtained, such as total energy loss and electron temperature, were compared with experimental results from the literature. The simulated cases that have more excited species and reactions in the energy balance are in better agreement with the experimental measurements.

scholarly journals Retardation effect for collisional energy loss of hard partons produced in a QGP

2006 ◽  
Vol 2006 (04) ◽  
pp. 011-011 ◽  
Author(s):  
Stéphane Peigné ◽  
Pol-Bernard Gossiaux ◽  
Thierry Gousset
Keyword(s):  
Energy Loss ◽  
Retardation Effect ◽  
Collisional Energy Loss ◽  
Collisional Energy

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

2007 ◽  
Author(s):  
Jia Cheng ◽  
Yu Zhu ◽  
Guanghong Duan ◽  
Yangying Chen
Keyword(s):  
Electron Temperature ◽  
Inductively Coupled Plasma ◽  
Three Dimensional ◽  
Argon Plasma ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
Parameters Selection ◽  
Dimensional Distribution ◽  
Discharge Model ◽  
Discharge Simulation

Based on the commercial software, CFD-ACE+, a three-dimensional discharge model of an inductively coupled plasma (ICP) etcher was built. The spatial distributions of the electron temperature and the electron number density (END) of the argon plasma were simulated at 10 mTorr, 200 W and 200 sccm. One-dimensional distribution profiles of the plasma parameters above the wafer’s surface at different pressures and powers were compared. These results demonstrate that the END increases with both pressure and power. And the electron temperature decreases with pressure. The methods and conclusions can be used to provide some reference for the configurations of the chamber and the coil of the ICP equipment design and improvement and process parameters selection.

scholarly journals Radiative and collisional energy loss, and photon-tagged jets at RHIC

2009 ◽  
Vol 61 (4) ◽  
pp. 819-823 ◽  
Author(s):  
G.-Y. Qin ◽  
J. Ruppert ◽  
C. Gale ◽  
S. Jeon ◽  
G. D. Moore
Keyword(s):  
Energy Loss ◽  
Collisional Energy Loss ◽  
Collisional Energy

scholarly journals HEAVY QUARK ENERGY LOSS THROUGH SOFT QCD SCATTERING IN THE QGP

2007 ◽  
Vol 16 (07n08) ◽  
pp. 2072-2078 ◽  
Author(s):  
KORINNA ZAPP ◽  
GUNNAR INGELMAN ◽  
JOHAN RATHSMAN ◽  
JOHANNA STACHEL
Keyword(s):  
Energy Loss ◽  
Heavy Quark ◽  
Jet Quenching ◽  
Gluon Radiation ◽  
Strong Suppression ◽  
Charm Quarks ◽  
Collisional Energy Loss ◽  
Collisional Energy ◽  
Model Based ◽  
Quark Energy Loss

A strong suppression of non-photonic electrons in Au + Au collisions is observed at Rhic. This is in disagreement with the expected dominance of the energy loss via gluon radiation, which predicts a much weaker suppression of heavy flavours due to the dead cone effect. However, collisional energy loss is also important, as demonstrated recently by the Soft Colour Interaction Jet Quenching model. Based on this model we show that collisional energy loss of charm quarks gives a suppression of electrons of the observed magnitude, but the contribution from beauty decays, which dominates at intermediate and large p⊥, results in a somewhat weaker overall suppression of electrons than observed.

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