Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication
Keyword(s):
1997 ◽
Vol 63
(606)
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pp. 530-536
Study on high precision single-pole magnetic encoder based on error analysis and compensation method
2020 ◽
Vol 1449
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pp. 012023
2010 ◽
Vol 55
(1-4)
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pp. 217-233
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Keyword(s):
2013 ◽
Vol 712-715
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pp. 1571-1575
2015 ◽
Vol 18
(1)
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pp. 1-7
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