Research and Design of Laser Accurate Displacement Measurement System
2011 ◽
Vol 301-303
◽
pp. 1289-1292
Keyword(s):
Laser displacement sensor(LDS) displacement measurement is a non-contact measurement with more precision and a wide range of applications.。In this paper, a laser accurate displacement measurement system based on LDS and three-dimensional linear-servomotor-driven actuators (3D LSDA) is presented. The 3D LSDA moving system is composed of linear servo motor, precision movable liner mechanism and servo machine. It is driven to move the noncontact laser displacement sensor to scan surfaces through the three-dimensional electric displacement platform, and then the measurement data is processed. The displacement sensor resolution is 2μm; each dimensional electric displacement platform repeated positioning accuracy is higher than 5μm.
2010 ◽
Vol 2010.8
(0)
◽
pp. 181-182
Keyword(s):
2009 ◽
Vol 9
(12)
◽
pp. 1872-1878
◽
Keyword(s):
2011 ◽
Vol 121-126
◽
pp. 1455-1459
◽