Fabrication and Characterization of RF Magnetron Sputtered Silicon Oxide Films

2014 ◽  
Vol 970 ◽  
pp. 102-105
Author(s):  
Jian Wei Hoon ◽  
Kah Yoong Chan ◽  
Cheng Yang Low

In this work, silicon dioxide (SiO2) films were fabricated on indium tin oxide (ITO) coated glass substrates by radio frequency (RF) magnetron sputtering deposition technique. The deposition rate of the magnetron sputtered SiO2 films was investigated. The SiO2 films were characterized with the atomic force microscopy (AFM) for their surface topology. In addition, the electrical insulating strength of the magnetron sputtered SiO2 was examined.

2011 ◽  
Vol 492 ◽  
pp. 202-205 ◽  
Author(s):  
Xi Wei Qi ◽  
Xiao Yan Zhang ◽  
Xuan Wang ◽  
Hai Bin Sun ◽  
Jian Quan Qi

BiFeO3 thin films were spin-coated on conductive indium tin oxide (ITO)/glass substrates by a simple sol-gel possess annealed at 470-590°C. The crystal structure of as-prepared BiFeO3 thin films annealed at different temperature was determined to be rhombohedral of R3m space and free of secondary phases was also confirmed. Cross section scanning electron microscope (SEM) pictures revealed that the thickness of BiFeO3 thin film was about 320 nm. The double remanent polarization 2Pr of BiFeO3 thin film annealed at 500°C is 2.5 μC/cm2 without applied field at room temperature. Image of atomic force microscopy indicated that the root-mean-square surface roughness value of BiFeO3 thin film was 6.13 nm.


Biosensors ◽  
2018 ◽  
Vol 8 (4) ◽  
pp. 118
Author(s):  
Rodica Ionescu ◽  
Raphael Selon ◽  
Nicolas Pocholle ◽  
Lan Zhou ◽  
Anna Rumyantseva ◽  
...  

Conductive indium-tin oxide (ITO) and non-conductive glass substrates were successfully modified with embedded gold nanoparticles (AuNPs) formed by controlled thermal annealing at 550 °C for 8 h in a preselected oven. The authors characterized the formation of AuNPs using two microscopic techniques: scanning electron microscopy (SEM) and atomic force microscopy (AFM). The analytical performances of the nanostructured-glasses were compared regarding biosensing of Hsp70, an ATP-driven molecular chaperone. In this work, the human heat-shock protein (Hsp70), was chosen as a model biomarker of body stress disorders for microwave spectroscopic investigations. It was found that microwave screening at 4 GHz allowed for the first time the detection of 12 ng/µL/cm2 of Hsp70.


1996 ◽  
Vol 440 ◽  
Author(s):  
H. C. Wang ◽  
D. W. Cheong ◽  
J. Kumar ◽  
C. Sung ◽  
S. K. Tripathy

AbstractA soluble, asymmetrically substituted polydiacetylene, poly(BPOD), has been reported to form stable monolayers at the air-water interface by the Langmuir-Blodgett (LB) technique [2]. Preformed polydiacetylene has been deposited onto hydrophobic substrates as multilayers to form second order nonlinear optical thin films. Second harmonic generation was found to increase with the number of layers. From previous atomic force microscopy (AFM) studies backbone orientation along the dipping direction with an interchain spacing of about 5 A° was indicated [2].The film morphology and preferential molecular orientation of these LB films are further investigated by transmission electron microscopy (TEM). A specifically tailored sample preparation method for the ultrathin LB films was used. Multilayer films were deposited on hydrophobic collodion covered glass substrates for this purpose. Electron diffraction was employed to study the crystalline organization of mono and multilayers of LB films as well as cast films.


2020 ◽  
Vol 2 ◽  
Author(s):  
Indra Sulania ◽  
R. Blessy Pricilla ◽  
G. B. V. S. Lakshmi

Nanocomposite materials are multi-phase materials, usually solids, which have two or more component materials having different chemical and physical properties. When blended together, a newer material is formed with distinctive properties which make them an eligible candidate for many important applications. In the present study, thin films of nafion (polymer) and hematite or α-Fe2O3 (nanoparticles) nanocomposite is fabricated on indium tin oxide (ITO) coated glass substrates, due to its enhanced ionic conductivity, for cholesterol biosensor applications. Scanning electron microscopy and Atomic force microscopy revealed the formation of nanorod structured α-Fe2O3 in the films. The cyclic voltammetry (CV) studies of nafion-α-Fe2O3/ITO revealed the redox properties of the nanocomposites. The sensing studies were performed on nafion-α-Fe2O3/CHOx/ITO bioelectrode using differential pulse voltammetry (DPV) at various concentrations of cholesterol. The enzyme immobilization leaded to the selective detection of cholesterol with a sensitivity of 64.93 × 10−2 μA (mg/dl)−1 cm−2. The enzyme substrate interaction (Michaelis–Menten) constant Km, was obtained to be 19 mg/dl.


2015 ◽  
Vol 1117 ◽  
pp. 139-142 ◽  
Author(s):  
Marius Dobromir ◽  
Radu Paul Apetrei ◽  
A.V. Rogachev ◽  
Dmitry L. Kovalenko ◽  
Dumitru Luca

Amorphous Nb-doped TiO2 thin films were deposited on (100) Si and glass substrates at room temperature by RF magnetron sputtering and a mosaic-type Nb2O5-TiO2 sputtering target. To adjust the amount of the niobium dopant in the film samples, appropriate numbers of Nb2O5 pellets were placed on the circular area of the magnetron target with intensive sputtering. By adjusting the discharge conditions and the number of niobium oxide pellets, films with dopant content varying between 0 and 16.2 at.% were prepared, as demonstrated by X-ray photoelectron spectroscopy data. The X-ray diffraction patterns of the as-deposited samples showed the lack of crystalline ordering in the samples. Surfaces roughness and energy band gap values increase with dopant concentration, as showed by atomic force microscopy and UV-Vis spectroscopy measurements.


Tribology ◽  
2006 ◽  
Author(s):  
A. H. Jayatissa ◽  
D. Wagner ◽  
S. Sorin ◽  
N. X. Randall

The mechanical properties of CrN films coated by radio frequency (rf) magnetron sputtering method were investigated. CrN films were coated on stainless steel, silicon wafer and glass substrates using sputtering of a Cr target in nitrogen ambient. The films were coated by varying the deposition temperature, nitrogen partial pressure and rf power density. The films coated were characterized by nanoindentation method, microhardness, optical, and corrosion tests. In order to use CrN as mechanical coating material, the surface roughness, hardness and adhesion properties have to be determined. The film properties were measured using atomic force microscopy and nanoindentation method and analyzed as a function of deposition conditions. It was found that these properties can be varied by changing the deposition conditions.


2015 ◽  
Vol 754-755 ◽  
pp. 1115-1119 ◽  
Author(s):  
A.S. Ibraheam ◽  
Y. Al-Douri ◽  
Uda Hashim

Cu2Zn0.8Cd0.2SnS4 pentrary alloy nanostructure were prepared and deposited on glass substrates with different copper concentrations ( 0.3, 0.5, 0.7 and 0.9 mol/L ) using Sol gel – spin coating method.morphological and analytical studies were investigated by Field Emission-Scanning Electron Microscope (FE-SEM), atomic force microscopy (AFM). It is found that the average grain size of Cu2Zn0.8Cd0.2SnS4 pentrary alloy nanostructure is 51.92 to 76.43 nm for the thin films prepared at 0.3, 0.5, 0.7 and 0.9 mol/L respectively .


2013 ◽  
Vol 537 ◽  
pp. 109-113
Author(s):  
Xi Wei Qi ◽  
Xiao Yan Zhang ◽  
Xuan Wang ◽  
Hai Bin Sun ◽  
Jian Quan Qi

A series of Dy doped La and Sc solution of BiFeO3 thin films have been prepared by using spin-coating process on conductive indium tin oxide (ITO)/glass substrates, which a simple sol-gel possess is applied and annealed at 500°C. With the increase of content of Dy, the strongest peak (110) of La and Sc solution BiFeO3 film tends to further broaden. There is no second phase existence within the present Dy doping level. Cross section scanning electron microscope (SEM) pictures revealed that the thickness of BiFeO3 film was about 370 nm. For Dy doping level is 0.05, the maximum double remanent polarization 2Pr of as-prepared BiFeO3 thin film is15.44 μC/cm2. Image of atomic force microscopy indicated that the root-mean-square surface roughness value of as-prepared BiFeO3 thin film is 2.11 nm. The dielectric constant of as-prepared films tends to firstly increase and then decrease with the increase of Dy content


2018 ◽  
Vol 1 (1) ◽  
pp. 565-571
Author(s):  
Zouaoui Ahmed

In this paper, we report on an analysis carried out by using cyclic voltammetric (CV) and chronoamperometric (CA) techniques on the reaction and nucleation mechanisms of electrodeposited copper on indium-doped tin oxide (ITO)-coated glass substrates from sulfate solutions. The present investigation has been performed in an acid solution at pH 5. The Scharifker and Hills model were used to analyze current transients. At relatively low overpotentials, the copper deposition can be described by a model involving instantaneous nucleation on active sites and diffusion-controlled 3D growth. The values of diffusion coefficient D for Cu2+ ions are estimated. Atomic force microscopy (AFM) has been used to check on the samples’ surface morphology.


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