scholarly journals Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 2: Simulation of Resist Developed Images at Electron and Ion Beam Lithography

Lithography ◽  
10.5772/8184 ◽  
2010 ◽  
Author(s):  
Katia Vutova ◽  
Elena Koleva ◽  
Georgy Mladenov
Keyword(s):  
Computer Simulation ◽  
Ion Beam ◽  
Ion Beam Lithography

scholarly journals Ion-beam lithography by use of highly charged Ar-ion beam

2006 ◽  
Vol 77 (3) ◽  
pp. 03C111 ◽  
Author(s):  
Sadao Momota ◽  
Shingo Iwamitsu ◽  
Shougo Goto ◽  
Yoichi Nojiri ◽  
Jun Taniguchi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography

Large-Scale Focused Helium Ion Beam Lithography

2021 ◽  
Vol 31 (5) ◽  
pp. 1-4
Author(s):  
Jay C. LeFebvre ◽  
Shane A. Cybart
Keyword(s):  
Large Scale ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

2012 ◽  
Vol 272 ◽  
pp. 149-152 ◽  
Author(s):  
Nitipon Puttaraksa ◽  
Somrit Unai ◽  
Michael W. Rhodes ◽  
Kanda Singkarat ◽  
Harry J. Whitlow ◽  
...  
Keyword(s):  
Soft Lithography ◽  
Ion Beam ◽  
Master Mold ◽  
Ion Beam Lithography

Maskless ion beam lithography system

1999 ◽  
Vol 46 (1-4) ◽  
pp. 469-472 ◽  
Author(s):  
Y. Lee ◽  
R.A. Gough ◽  
T.J. King ◽  
Q. Ji ◽  
K.N. Leung ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography ◽  
Lithography System

Microstructures of GaAs fabricated by finely focused ion beam lithography

1989 ◽  
Vol 9 (1-4) ◽  
pp. 277-279 ◽  
Author(s):  
Takao Shiokawa ◽  
Pil Hyon Kim ◽  
Manabu Hamagaki ◽  
Tamio Hara ◽  
Yoshinobu Aoyagi ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Lithography

High energy heavy ion beam lithography in silicon

2007 ◽  
Vol 261 (1-2) ◽  
pp. 731-735 ◽  
Author(s):  
Bibhudutta Rout ◽  
Alexander D. Dymnikov ◽  
Daniel P. Zachry ◽  
Elia V. Eschenazi ◽  
Yongqiang Q. Wang ◽  
...  
Keyword(s):  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
Ion Beam Lithography ◽  
Heavy Ion Beam
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