Low Temperature Deposition of High Quality Silicon Oxide Films
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1990 ◽
Vol 5
(4)
◽
pp. 361-363
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1963 ◽
Vol 110
(5)
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pp. 465
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1997 ◽
Vol 15
(4)
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pp. 1951-1954
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2007 ◽
pp. 645-648
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2009 ◽
Vol 48
(3)
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pp. 035502
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2020 ◽
Vol 544
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pp. 125726
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