Large Area Doping Process for Fabrication of p-Si TFT's Using Bucket Ion Source and XeCl Excimer Laser Annealing
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1990 ◽
Vol 29
(Part 2, No. 12)
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pp. L2370-L2372
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1992 ◽
Vol 31
(Part 1, No. 4)
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pp. 1012-1015
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2007 ◽
pp. 371-374
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1997 ◽
Vol 36
(Part 1, No. 3B)
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pp. 1614-1617
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2002 ◽
Vol 33
(1)
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pp. 57
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Epitaxial growth of tin oxide films on (001) TiO2 substrates by KrF and XeCl excimer laser annealing
2005 ◽
Vol 248
(1-4)
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pp. 118-122
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1986 ◽
Vol 7
(5)
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pp. 276-278
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