defect characterization
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2022 ◽  
Vol 236 ◽  
pp. 111530
Author(s):  
Saman Jafari ◽  
Malcolm Abbott ◽  
Daqi Zhang ◽  
Jian Wu ◽  
Fangdan Jiang ◽  
...  

2021 ◽  
Author(s):  
Hyun Woo Shim ◽  
Taehun Lee ◽  
Jonghan Kwon

Abstract This study demonstrates that a high-volume TEM workflow can be achieved for inline defect characterization by adding a defect marking step using commercially available tools. A simple user-assisted defect marking step added to a conventional automated ex-situ lift-out TEM workflow showed 2.9 times faster throughput using 11 times less man-hours, a significant productivity gain over a conventional manual TEM workflow.


JOM ◽  
2021 ◽  
Author(s):  
P. Hosemann ◽  
R. Auguste ◽  
S. Lam ◽  
M. Butterling ◽  
M. O. Liedke ◽  
...  

2021 ◽  
Author(s):  
Jian Chen ◽  
Weiyang Yu ◽  
Haifeng Zhou ◽  
Jian Zhang ◽  
Xi Wang ◽  
...  

2021 ◽  
Vol 145 ◽  
pp. 106679
Author(s):  
Roberto Marani ◽  
Davide Palumbo ◽  
Umberto Galietti ◽  
Tiziana D'Orazio

2021 ◽  
Vol 27 (S1) ◽  
pp. 918-919
Author(s):  
Julia Deitz ◽  
Tim Ruggles ◽  
Philip Noell ◽  
Donald Susan ◽  
Joseph Michael

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