interferometer method
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Sensors ◽  
2018 ◽  
Vol 18 (11) ◽  
pp. 3875 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Yu-Fan Pu ◽  
Yu-Ta Chen ◽  
Yong-Tai Luo

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).


2012 ◽  
Vol 586 ◽  
pp. 316-321
Author(s):  
Ya Wei Wang ◽  
Yuan Yuan Xu ◽  
Xing Long Zhu ◽  
Shou Wang Jiang ◽  
Yu Jiao Chen ◽  
...  

Measuring shape of bubbles is very important in many industrial processes, because that its behavior in the fluid is closely related to its morphology. Phase microscopy imaging (PMI) method is one of the best useful methods in this field. In the paper, considering on PMI idea, it is put out a new method which improves an ordinary light microscope into a dual function that can do both PMI and its ordinary microscopy function. Its optical structure is designed by using Mach-Zehnder interferometer method which can be added on the platform of ordinary microscope. A glass hole (bubble) is used as a sample to do phase microscopy imaging via the improved device. The results of the experiment and theory show that the phase distribution of bubble is closely related to the shape of it, which is very useful to detect the bubble’s behavior in the flow field. Besides bubbles, the improved microscope can be also used to observe the phase body such as cells.


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