Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
Latest Publications

TOTAL DOCUMENTS

176

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

4930813832

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Fabrication Of Nanometer-Order Dot Patterns By Lift-Off Using Fullerene-Incorporated Bilayer Resist System

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730108 ◽

1998 ◽

Keyword(s):

Lift Off

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Effects Of Etch-Induced Damage And Contamination On The Physical And Electrical Properties Of Cobalt Silicides

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730055 ◽

1998 ◽

Keyword(s):

Electrical Properties ◽

Cobalt Silicides

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Proposal Of The Coma Aberration Dependent Overlay Error Compensation Technology

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729986 ◽

1998 ◽

Keyword(s):

Error Compensation ◽

Coma Aberration

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Thermal Distortion Of An X-Ray Mask For Synchrotron Radiation Lithography

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729999 ◽

1998 ◽

Keyword(s):

Synchrotron Radiation ◽

Thermal Distortion ◽

X Ray

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A High Performance Polycrystalline Silicon Thin Film Transistor Using A Metal Induced Crystallization With A Ni Solution

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730107 ◽

1998 ◽

Keyword(s):

Thin Film ◽

Polycrystalline Silicon ◽

High Performance ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Metal Induced Crystallization ◽

Induced Crystallization

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Quantized Conductance Of A Gate-All-Around Silicon Quantum Wire Transistor

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730018 ◽

1998 ◽

Keyword(s):

Quantum Wire

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Fabrication Of Periodic Si Nanostructure By Controlled Anodization

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730022 ◽

1998 ◽

Download Full-text

Nanofabrication Using Scanning Near-Field Optical Microscopy

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730081 ◽

1998 ◽

Keyword(s):

Optical Microscopy ◽

Near Field

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Sub-Quarter-Micron PT Etching Technology Using Round Head EB Resist

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730112 ◽

1998 ◽

Download Full-text

Process Technology For Next Generation Photomask

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729953 ◽

1998 ◽

Keyword(s):

Next Generation ◽

Process Technology

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Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Fabrication Of Nanometer-Order Dot Patterns By Lift-Off Using Fullerene-Incorporated Bilayer Resist System

Effects Of Etch-Induced Damage And Contamination On The Physical And Electrical Properties Of Cobalt Silicides

Proposal Of The Coma Aberration Dependent Overlay Error Compensation Technology

Thermal Distortion Of An X-Ray Mask For Synchrotron Radiation Lithography

A High Performance Polycrystalline Silicon Thin Film Transistor Using A Metal Induced Crystallization With A Ni Solution

Quantized Conductance Of A Gate-All-Around Silicon Quantum Wire Transistor

Fabrication Of Periodic Si Nanostructure By Controlled Anodization

Nanofabrication Using Scanning Near-Field Optical Microscopy

Sub-Quarter-Micron PT Etching Technology Using Round Head EB Resist

Process Technology For Next Generation Photomask

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
Latest Publications