Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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8
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Published By Springer US
9780387288420
2006 ◽
pp. 107-161
2006 ◽
pp. 17-45
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2006 ◽
pp. 163-191
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2006 ◽
pp. 47-103
2006 ◽
pp. 193-212
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2006 ◽
pp. 213-244