Evolution of photoresist layer structure and surface morphology under fluorocarbon‐based plasma exposure
2019 ◽
Vol 16
(9)
◽
pp. 1900026
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1984 ◽
Vol 30
(104)
◽
pp. 82-93
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 417
(1-3)
◽
pp. 528-532
◽
Keyword(s):
Keyword(s):
Keyword(s):
1982 ◽
Vol 40
◽
pp. 224-225
1988 ◽
Vol 46
◽
pp. 204-205