Oxygen transport from a silica crucible in Czochralski silicon growth

1996 ◽  
Vol 165 (4) ◽  
pp. 362-371 ◽  
Author(s):  
Shinji Togawa ◽  
Koji Izunome ◽  
Soroku Kawanishi ◽  
Sang-Ik Chung ◽  
Kazutaka Terashima ◽  
...  
Keyword(s):  
Oxygen Transport ◽  
Czochralski Silicon ◽  
Silicon Growth

Numerical simulation of oxygen transport during the Czochralski silicon crystal growth with a cusp magnetic field

2014 ◽  
Vol 401 ◽  
pp. 888-894 ◽  
Author(s):  
J.-C. Chen ◽  
P.-C. Guo ◽  
C.-H. Chang ◽  
Y.-Y. Teng ◽  
C. Hsu ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Numerical Simulation ◽  
Crystal Growth ◽  
Oxygen Transport ◽  
Silicon Crystal ◽  
Czochralski Silicon ◽  
Cusp Magnetic Field

Effective simulation of the effect of a transverse magnetic field (TMF) in Czochralski Silicon growth

2012 ◽  
Vol 360 ◽  
pp. 18-24 ◽  
Author(s):  
Yoan Collet ◽  
Olivier Magotte ◽  
Nathalie Van den Bogaert ◽  
Roman Rolinsky ◽  
Fabrice Loix ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Transverse Magnetic Field ◽  
Transverse Magnetic ◽  
Czochralski Silicon ◽  
Silicon Growth

Oxygen segregation in Czochralski silicon growth

1983 ◽  
Vol 54 (2) ◽  
pp. 1082-1085 ◽  
Author(s):  
Wen Lin ◽  
D. W. Hill
Keyword(s):  
Czochralski Silicon ◽  
Silicon Growth

Thermal simulation of the Czochralski silicon growth process by three different models and comparison with experimental results

1997 ◽  
Vol 180 (3-4) ◽  
pp. 461-467 ◽  
Author(s):  
E. Dornberger ◽  
E. Tomzig ◽  
A. Seidl ◽  
S. Schmitt ◽  
H.-J. Leister ◽  
...  
Keyword(s):  
Growth Process ◽  
Thermal Simulation ◽  
Experimental Results ◽  
Czochralski Silicon ◽  
Silicon Growth

Gas flow effect on global heat transport and melt convection in Czochralski silicon growth

2003 ◽  
Vol 249 (1-2) ◽  
pp. 87-99 ◽  
Author(s):  
V.V. Kalaev ◽  
I.Yu. Evstratov ◽  
Yu.N. Makarov
Keyword(s):  
Heat Transport ◽  
Gas Flow ◽  
Flow Effect ◽  
Czochralski Silicon ◽  
Silicon Growth ◽  
Melt Convection

Vacancy behavior in Czochralski silicon growth

2009 ◽  
Vol 311 (14) ◽  
pp. 3592-3597 ◽  
Author(s):  
Sang Hun Lee ◽  
Jeong Won Kang ◽  
Young Ho Hong ◽  
Hyun Jung Oh ◽  
Do Hyun Kim
Keyword(s):  
Czochralski Silicon ◽  
Silicon Growth
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