78 K infrared absorption method for measuring the oxygen content in silicon

1983 ◽  
Vol 2 (2) ◽  
pp. 101-103 ◽  
Author(s):  
Yuezhen Li ◽  
Jinyuan Shen ◽  
Qimin Wang
Keyword(s):  
Oxygen Content ◽  
Infrared Absorption ◽  
Absorption Method

scholarly journals In situ measurement of micro flow rate using near infrared absorption method

2018 ◽  
Vol 26 (13) ◽  
pp. 17078 ◽  
Author(s):  
Seok Hwan Lee ◽  
Joohyun Lee ◽  
Sejong Chun ◽  
Woong Kang
Keyword(s):  
Flow Rate ◽  
Infrared Absorption ◽  
Near Infrared ◽  
In Situ Measurement ◽  
Absorption Method ◽  
Micro Flow

Evaluation of Carbon and Oxygen Content of Silicon Wafers Using Infrared Absorption

1980 ◽  
Vol 34 (2) ◽  
pp. 167-171 ◽  
Author(s):  
D. G. Mead ◽  
S. R. Lowry
Keyword(s):  
Fourier Transform ◽  
Oxygen Content ◽  
Infrared Absorption ◽  
Room Temperature ◽  
Fourier Transform Infrared ◽  
Silicon Wafers ◽  
Reference Standard ◽  
Infrared Measurements ◽  
Oxygen Concentrations

Room temperature Fourier transform infrared measurements on some contaminated silicon wafers are presented. Use of subtractive techniques readily allows both carbon and oxygen concentrations of about 0.1 ppm atomic to be obtained in relatively short measurement times (about 1 min), providing an adequate “pure” wafer is used as the reference standard.

Interlaboratory Determination of the Calibration Factor for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption

2019 ◽  
Vol 136 (7) ◽  
pp. 2015-2024 ◽  
Author(s):  
A. Baghdadi ◽  
W. M. Bullis ◽  
M. C. Croarkin ◽  
Yue‐zhen Li ◽  
R. I. Scace ◽  
...  
Keyword(s):  
Oxygen Content ◽  
Infrared Absorption ◽  
Calibration Factor ◽  
Interstitial Oxygen

Discussion of Problems of Measurement Carbon on the Inner Surface of Inner Grooved Copper Tube by Infrared Absorption Method

2012 ◽  
Vol 503-504 ◽  
pp. 1347-1350
Author(s):  
Huai Bao Yuan ◽  
Yue Hong Li
Keyword(s):  
Flow Rate ◽  
Infrared Absorption ◽  
Copper Tube ◽  
Absorption Method ◽  
Calibration Constant ◽  
Integral Calculus ◽  
Surface Carbon ◽  
Inner Surface ◽  
Recovery Experiment

The inner surface carbon in the inner grooved copper tube was determined by tube furnace heating-infrared absorption method. Some factors which influenced the determination such as sample preparation and cleaning, flow rate, furnace constants, blank value, calibration constant were tested and optimized. The inner surface carbon of copper tube was released completely while the experiment temperature was chosen as 400~600°C and the flow rate of oxygen was 750 mL/min. And the obtained integral calculus curve was ideal. The method has been applied to the determination of inner surface carbon in the inner grooved copper tube with carbon content of 0.24 mg/dm2. The result of the RSD was 3.7％. And the recovery experiment through joining in synthesize carbon sample was carried on, the recovery was 98～103%.

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