The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure
2006 ◽
Vol 9
(6)
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pp. 975-979
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2008 ◽
Vol 85
(7)
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pp. 1524-1528
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2007 ◽
Vol 28
(12)
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pp. 1089-1091
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2021 ◽
Vol 39
(4)
◽
pp. 043201
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