Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage

2017 ◽  
Vol 92 ◽  
pp. 94-104 ◽  
Author(s):  
Yu-Ta Chen ◽  
Wei-Chen Lin ◽  
Chien-Sheng Liu
Keyword(s):  
Measurement System ◽  
Experimental Verification ◽  
Geometric Error ◽  
Degree Of Freedom ◽  
Error Measurement ◽  
Linear Stage ◽  
Six Degree Of Freedom ◽  
Geometric Error Measurement

Development of a Six-Degree-of-Freedom Geometric Error Measurement System for a Meso-Scale Machine Tool

2005 ◽  
Vol 127 (4) ◽  
pp. 857-865 ◽  
Author(s):  
Sang Won Lee ◽  
Rhett Mayor ◽  
Jun Ni
Keyword(s):  
Beam Splitter ◽  
Geometric Error ◽  
Laser Beams ◽  
Error Measurement ◽  
Error Components ◽  
Laser Module ◽  
Cube Beam Splitter ◽  
Six Degree Of Freedom ◽  
Geometric Error Measurement ◽  
Meso Scale

This paper presents the development of a six-degree-of-freedom (DOF) geometric error measurement (6GEM) system that can be applied to the simultaneous measurement of six geometric error components of the moving axes of a meso-scale machine tool (mMT). The system consists of a laser module constructed by a cube beam splitter and a pigtailed laser diode, three two-dimensional position sensitive detectors (PSDs), and an additional cube beam splitter. The laser module moving with the positioning system of the developed mMT testbed generates two perpendicular laser beams, one of which is further divided into two laser beams at the second cube beam splitter. These three laser beams are detected by the three PSDs, and the full pose of the laser module is then calculated simultaneously by forward and inverse kinematic computations. The calculated full pose of the laser module is translated into six-DOF geometric errors of the mMT testbed. A series of experiments are performed to demonstrate the effectiveness and accuracy of the proposed 6GEM system. The experimental results show that the measurement accuracy of the 6GEM system was better than ±0.6μm for translational error components and ±0.6arcsec for angular error components.

scholarly journals A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

2019 ◽  
Vol 9 (3) ◽  
pp. 574 ◽  
Author(s):  
Tung-Hsien Hsieh ◽  
Po-Yu Chen ◽  
Wen-Yuh Jywe ◽  
Guan-Wu Chen ◽  
Ming-Shi Wang
Keyword(s):  
Service Life ◽  
Measurement System ◽  
Laser Interferometer ◽  
Geometric Error ◽  
Laser Source ◽  
Error Measurement ◽  
Geometric Errors ◽  
Optical Module ◽  
Geometric Error Measurement ◽  
Residual Errors

Geometric errors, such as straightness, perpendicularity, and parallelism errors are determinant factors of both the accuracy and service life of a linear guideway. In this study, a multipurpose geometric error measurement system was mainly composed of a laser source and an in-lab-developed optical module is proposed. Two adjustment methods were used for the in-lab-developed optical module to calibrate the altitude angle of the pentaprism: The first one is designed for ease of operation based on Michelson principle using a laser interferometer as the light receiver, and the second is aimed at high calibration repeatability based on the autocollimator principle using the quadrant detector (QD) to replace the light receiver. The result shows that the residual errors of the horizontal straightness and the vertical straightness are within ±1.3 µm and ±5.3 µm, respectively, when referred to as the commercial laser interferometer. Additionally, the residual errors of perpendicularity and parallelism are within ±1.2 µm and ±0.1 µm, respectively, when referred to as the granite reference blocks

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

2016 ◽  
Vol 87 (6) ◽  
pp. 065109 ◽  
Author(s):  
Xiangzhi Yu ◽  
Steven R. Gillmer ◽  
Shane C. Woody ◽  
Jonathan D. Ellis
Keyword(s):  
Measurement System ◽  
Degree Of Freedom ◽  
Linear Stage ◽  
Six Degree Of Freedom

scholarly journals Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Sensors ◽  
2018 ◽  
Vol 18 (11) ◽  
pp. 3875 ◽  
Author(s):  
Chien-Sheng Liu ◽  
Yu-Fan Pu ◽  
Yu-Ta Chen ◽  
Yong-Tai Luo
Keyword(s):  
Measurement System ◽  
Taylor Series Expansion ◽  
Degree Of Freedom ◽  
Geometric Errors ◽  
Linear Stage ◽  
Six Degree Of Freedom ◽  
Geometric Motion ◽  
Laser Interferometers ◽  
Interferometer Method ◽  
Conventional Laser

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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