Langmuir Probe Diagnostics of Low-pressure Inductively Coupled Argon Plasmas in a Magnetic Field
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2001 ◽
Vol 10
(2)
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pp. 181-190
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2001 ◽
Vol 34
(18)
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pp. 2854-2861
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Keyword(s):
Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition
1999 ◽
Vol 17
(3)
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pp. 721-725
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1997 ◽
Vol 37
(5)
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pp. 417-429
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