scholarly journals PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)

2012 ◽  
Vol 177 ◽  
pp. 37-47 ◽  
Author(s):  
Ioan Alexandru Ivan ◽  
Joël Agnus ◽  
Pierre Lambert
2017 ◽  
Vol 100 (9) ◽  
pp. 3961-3972 ◽  
Author(s):  
Ryan Keech ◽  
Carl Morandi ◽  
Margeaux Wallace ◽  
Giovanni Esteves ◽  
Lyndsey Denis ◽  
...  

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