PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)
2012 ◽
Vol 177
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pp. 37-47
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2012 ◽
Vol 38
(7)
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pp. 661-664
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1995 ◽
Vol 34
(Part 1, No. 10)
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pp. 5658-5663
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2003 ◽
Vol 86
(11)
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pp. 1988-1990
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2017 ◽
Vol 100
(9)
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pp. 3961-3972
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2009 ◽
Vol 126
(4)
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pp. 2196
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