A low-cost built-in self-test method for thermally actuated resistive MEMS sensors
2013 ◽
Vol 194
◽
pp. 8-15
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Keyword(s):
Low Cost
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2004 ◽
Vol 87
(10)
◽
pp. 54-65
Keyword(s):
2021 ◽
Vol 26
(6)
◽
pp. 1-12
Keyword(s):
2001 ◽
Vol 9
(2)
◽
pp. 290-296
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Keyword(s):