Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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Large Area Surface Treatment by Ion Beam Technology

MRS Proceedings ◽

10.1557/proc-438-611 ◽

1996 ◽

Vol 438 ◽

Cited By ~ 2

Author(s):

R. L. C. Wu ◽

W. Lanter

Keyword(s):

Ion Beam ◽

High Vacuum ◽

Polycrystalline Diamond ◽

Carbon Films ◽

Ultra High Vacuum ◽

Diamond Like Carbon ◽

Chemical Compositions ◽

Rf Power ◽

Large Area ◽

Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Thin Solid Films ◽

10.1016/j.tsf.2005.12.223 ◽

2006 ◽

Vol 515 (2) ◽

pp. 636-639 ◽

Cited By ~ 35

Author(s):

Š. Meškinis ◽

V. Kopustinskas ◽

K. Šlapikas ◽

S. Tamulevičius ◽

A. Guobienë ◽

...

Keyword(s):

Nanoimprint Lithography ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Ion Beam Synthesis

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Analysis of Surface Properties of Diamond-Like Carbon Films by a Sputtering Deposition

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.662.505 ◽

2013 ◽

Vol 662 ◽

pp. 505-510 ◽

Cited By ~ 1

Author(s):

Jium Fang ◽

Maw Tyan Sheen ◽

Ming Der Jean

Keyword(s):

Photoelectron Spectroscopy ◽

Fuzzy Inference ◽

Carbon Films ◽

Experimental Results ◽

Wear Volume ◽

Diamond Like Carbon ◽

Sputtering Deposition ◽

Tribological Behaviors ◽

Predicted Values ◽

Inference Systems

A new approach with adaptive network-based fuzzy inference systems (ANFIS) based on experimental designs was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by a magnetron sputtering system. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). In this study, a group of highly developed hillock-like textures appeared and a lower wear volume loss became visible in the DLC films. Furthermore, the predicted values and experimental results, in which the ANFIS effectively predicts the tribological behaviors of the DLC films, are similar. It was experimentally confirmed the ANFIS predictions agreed with the experiments. Therefore, the experimental results demonstrate the tribological properties on DLC multilayer films are accurately predicted by ANFIS, thereby justifying the reliability and feasibility of the approach.

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