scholarly journals High Spatial Resolution Spectroscopy in a FE-SEM: X-ray Microanalysis and Electron Energy-Loss Spectroscopy

2017 ◽  
Vol 23 (S1) ◽  
pp. 1044-1045 ◽  
Author(s):  
Hendrix Demers ◽  
Nicolas Brodusch ◽  
Raynald Gauvin
Author(s):  
R. F. Egerton

An important parameter governing the sensitivity and accuracy of elemental analysis by electron energy-loss spectroscopy (EELS) or by X-ray emission spectroscopy is the signal/noise ratio of the characteristic signal.


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