Recrystallization kinetics of electroplated Cu in damascene trenches at room temperature

1998 ◽  
Vol 84 (10) ◽  
pp. 5547-5553 ◽  
Author(s):  
C. Lingk ◽  
M. E. Gross
2018 ◽  
Vol 24 (1) ◽  
pp. 32 ◽  
Author(s):  
Lahcene Fellah ◽  
Abdallah Diha ◽  
Zakaria Boumerzoug

This work aims to investigate the microstructure after cold-wiredrawing process of commercial copper and its recrystallization kinetics under isochronal annealing. In this paper, the samples studied are commercial copper wires reduced at six different reductions by a wiredrawing at room temperature. Optical microscopy, Scanning Electron Microscopy (SEM), and DSC were used as characterization techniques. The samples were annealed under Argon atmosphere with four different heating rates by using DSC. The Kissinger, Ozawa, Boswell, and Starink methods were used to determine the recrystallization kinetics. The results showed that the cold-wiredrawing had caused the elongation of grains along the main axis of the wires also showed the existence of slip bands. It has been found, on the one side, that the recrystallization temperature increased and shifted to higher temperatures as the heating rate increased, which means that this reaction is thermally actived; On the other sidethe recrystallization temperature clearly shifted to lower temperatures as the deformation increased, which indicated that recrystallization is profoundly enhanced by high deforming.We noted a decrease in the activation energy values when the reduction increases, the activation energy for the most reduced materials were lower than that in the less reduced wires.


2016 ◽  
Vol 879 ◽  
pp. 648-652
Author(s):  
Hyun Woo Lee ◽  
Seok Hong Min ◽  
Tae Kwon Ha

Recrystallization kinetics of aluminum with various purities from 99.5 to 99.999(5N) has been investigated in this study. Aluminum plates of 10 mm thickness with various purities were solution-treated at 400oC for 24 hrs and then rolled into sheets of 50 μm thickness at room temperature. Cold rolling was conducted on samples with various purities from 99.9 to 99.999 including commercial AA 1050 Al alloy and high purity through about 20 passes to obtain thin foils of 50 μm thickness. Accumulative rolling was employed when sample thickness reached at 1 mm and thin foils were successfully obtained for all samples. Hardness was measured just after cold rolling at room temperature as a function of time up to 1hr to elucidated recrystallization behavior. For aluminum with 99.999% purity, recrystallization occurred after 200 s and finished at 360 s. Recrystallization kinetics of aluminum at high temperatures from 100 to 350oC were investigated by measure hardness after annealing thin foils for various time intervals ranging from 1 s to 24 hrs. For high purity sample with 99.999% purity, recrystallization finished just after 1 s even at the relatively low temperature of 100oC, while recrystallization of commercial AA 1050 (2N) alloy finished after 360 s at 350oC.


Author(s):  
Harry A. Atwater ◽  
C.M. Yang ◽  
K.V. Shcheglov

Studies of the initial stages of nucleation of silicon and germanium have yielded insights that point the way to achievement of engineering control over crystal size evolution at the nanometer scale. In addition to their importance in understanding fundamental issues in nucleation, these studies are relevant to efforts to (i) control the size distributions of silicon and germanium “quantum dots𠇍, which will in turn enable control of the optical properties of these materials, (ii) and control the kinetics of crystallization of amorphous silicon and germanium films on amorphous insulating substrates so as to, e.g., produce crystalline grains of essentially arbitrary size.Ge quantum dot nanocrystals with average sizes between 2 nm and 9 nm were formed by room temperature ion implantation into SiO2, followed by precipitation during thermal anneals at temperatures between 30°C and 1200°C[1]. Surprisingly, it was found that Ge nanocrystal nucleation occurs at room temperature as shown in Fig. 1, and that subsequent microstructural evolution occurred via coarsening of the initial distribution.


1977 ◽  
Vol 16 (01) ◽  
pp. 30-35 ◽  
Author(s):  
N. Agha ◽  
R. B. R. Persson

SummaryGelchromatography column scanning has been used to study the fractions of 99mTc-pertechnetate, 99mTcchelate and reduced hydrolyzed 99mTc in preparations of 99mTc-EDTA(Sn) and 99mTc-DTPA(Sn). The labelling yield of 99mTc-EDTA(Sn) chelate was as high as 90—95% when 100 μmol EDTA · H4 and 0.5 (Amol SnCl2 was incubated with 10 ml 99mTceluate for 30—60 min at room temperature. The study of the influence of the pH-value on the fraction of 99mTc-EDTA shows that pH 2.8—2.9 gave the best labelling yield. In a comparative study of the labelling kinetics of 99mTc-EDTA(Sn) and 99mTc- DTPA(Sn) at different temperatures (7, 22 and 37°C), no significant influence on the reduction step was found. The rate constant for complex formation, however, increased more rapidly with increased temperature for 99mTc-DTPA(Sn). At room temperature only a few minutes was required to achieve a high labelling yield with 99mTc-DTPA(Sn) whereas about 60 min was required for 99mTc-EDTA(Sn). Comparative biokinetic studies in rabbits showed that the maximum activity in kidneys is achieved after 12 min with 99mTc-EDTA(Sn) but already after 6 min with 99mTc-DTPA(Sn). The long-term disappearance of 99mTc-DTPA(Sn) from the kidneys is about five times faster than that for 99mTc-EDTA(Sn).


2009 ◽  
Vol 59 (12) ◽  
Author(s):  
Mihai Contineanu ◽  
iulia Contineanu ◽  
Ana Neacsu ◽  
Stefan Perisanu

The radiolysis of the isomers L-, D- and DL- of the aspartic acid, in solid polycrystalline state, was investigated at room temperature. The analysis of their ESR spectra indicated the formation of at least two radicalic entities. The radical, identified as R3, resulting from the deamination of the acid, exhibits the highest concentration and thermal resistance. Possible mechanisms of formation of three radical species are suggested, based also on literature data. The kinetics of the disappearance of radical R3 indicated a complex mechanism. Three possible variants were suggested for this mechanism.


1992 ◽  
Vol 57 (11) ◽  
pp. 2302-2308
Author(s):  
Karel Mocek ◽  
Erich Lippert ◽  
Emerich Erdös

The kinetics of the reaction of solid sodium carbonate with sulfur dioxide depends on the microstructure of the solid, which in turn is affected by the way and conditions of its preparation. The active form, analogous to that obtained by thermal decomposition of NaHCO3, emerges from the dehydration of Na2CO3 . 10 H2O in a vacuum or its weathering in air at room temperature. The two active forms are porous and have approximately the same specific surface area. Partial hydration of the active Na2CO3 in air at room temperature followed by thermal dehydration does not bring about a significant decrease in reactivity. On the other hand, if the preparation of anhydrous Na2CO3 involves, partly or completely, the liquid phase, the reactivity of the product is substantially lower.


2021 ◽  
pp. 009524432110203
Author(s):  
Sudhir Bafna

It is often necessary to assess the effect of aging at room temperature over years/decades for hardware containing elastomeric components such as oring seals or shock isolators. In order to determine this effect, accelerated oven aging at elevated temperatures is pursued. When doing so, it is vital that the degradation mechanism still be representative of that prevalent at room temperature. This places an upper limit on the elevated oven temperature, which in turn, increases the dwell time in the oven. As a result, the oven dwell time can run into months, if not years, something that is not realistically feasible due to resource/schedule constraints in industry. Measuring activation energy (Ea) of elastomer aging by test methods such as tensile strength or elongation, compression set, modulus, oxygen consumption, etc. is expensive and time consuming. Use of kinetics of weight loss by ThermoGravimetric Analysis (TGA) using the Ozawa/Flynn/Wall method per ASTM E1641 is an attractive option (especially due to the availability of commercial instrumentation with software to make the required measurements and calculations) and is widely used. There is no fundamental scientific reason why the kinetics of weight loss at elevated temperatures should correlate to the kinetics of loss of mechanical properties over years/decades at room temperature. Ea obtained by high temperature weight loss is almost always significantly higher than that obtained by measurements of mechanical properties or oxygen consumption over extended periods at much lower temperatures. In this paper, data on five different elastomer types (butyl, nitrile, EPDM, polychloroprene and fluorocarbon) are presented to prove that point. Thus, use of Ea determined by weight loss by TGA tends to give unrealistically high values, which in turn, will lead to incorrectly high predictions of storage life at room temperature.


2007 ◽  
Vol 111 (37) ◽  
pp. 13957-13966 ◽  
Author(s):  
Emma I. Rogers ◽  
Debbie S. Silvester ◽  
Sarah E. Ward Jones ◽  
Leigh Aldous ◽  
Christopher Hardacre ◽  
...  

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