Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

2021 ◽  
Vol 28 (12) ◽  
pp. 123505
Author(s):  
Shali Yang ◽  
Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

scholarly journals The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

2013 ◽  
Vol 103 (6) ◽  
pp. 064102 ◽  
Author(s):  
Ihor Korolov ◽  
Aranka Derzsi ◽  
Zoltán Donkó ◽  
Julian Schulze
Keyword(s):  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Electrical asymmetry effect in inhomogeneously magnetized capacitively coupled plasmas

2020 ◽  
Vol 29 (11) ◽  
pp. 114002
Author(s):  
Jing-Yu Sun ◽  
Quan-Zhi Zhang ◽  
Jia-Rui Liu ◽  
Yuan-Hong Song ◽  
You-Nian Wang
Keyword(s):  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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