Investigation into the error compensation method of the surface form based on feed rate optimization in deterministic polishing
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2021 ◽
Vol 114
(5-6)
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pp. 1323-1339
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2012 ◽
Vol 542-543
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pp. 551-554
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1994 ◽
Vol 34
(3)
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pp. 365-377
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2014 ◽
Vol 75
(9-12)
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pp. 1661-1679
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2011 ◽
Vol 110-116
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pp. 2821-2828
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