Influence of superconductor film composition on adhesion strength of coated conductors

Ibrahim Kesgin; Narayan Khatri; Yuhao Liu; Louis Delgado; Eduard Galstyan; Venkat Selvamanickam

doi:10.1088/0953-2048/29/1/015003

Influence of superconductor film composition on adhesion strength of coated conductors

Superconductor Science and Technology ◽

10.1088/0953-2048/29/1/015003 ◽

2015 ◽

Vol 29 (1) ◽

pp. 015003 ◽

Cited By ~ 9

Author(s):

Ibrahim Kesgin ◽

Narayan Khatri ◽

Yuhao Liu ◽

Louis Delgado ◽

Eduard Galstyan ◽

...

Keyword(s):

Adhesion Strength ◽

Coated Conductors ◽

Film Composition ◽

Superconductor Film

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YBCO coated conductors by reactive thermal co-evaporation

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:20011117 ◽

2001 ◽

Vol 11 (PR11) ◽

pp. Pr11-109-Pr11-113

Author(s):

U. Schmatz ◽

Ch. Hoffmann ◽

M. Bauer ◽

R. Metzger ◽

P. Berberich ◽

...

Keyword(s):

Coated Conductors ◽

Ybco Coated Conductors

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The Correlation of Adhesion Strength with Barrier Structure in Cu Metallization

MRS Proceedings ◽

10.1557/proc-766-e.3.5 ◽

2003 ◽

Vol 766 ◽

Author(s):

A. Sekiguchi ◽

J. Koike ◽

K. Ueoka ◽

J. Ye ◽

H. Okamura ◽

...

Keyword(s):

Thin Films ◽

Adhesion Strength ◽

Nitrogen Concentration ◽

Scratch Test ◽

Barrier Structure ◽

Barrier Layers ◽

Cu Metallization ◽

Microstructure Observation ◽

Sputter Deposited ◽

Sulfur Containing

AbstractAdhesion strength in sputter-deposited Cu thin films on various types of barrier layers was investigated by scratch test. The barrier layers were Ta1-xNx with varied nitrogen concentration of 0, 0.2, 0.3, and 0.5. Microstructure observation by TEM indicated that each layer consists of mixed phases of β;-Ta, bcc-TaN0.1, hexagonal-TaN, and fcc-TaN, depending on the nitrogen concentration. A sulfur- containing amorphous phase was also present discontinuously at the Cu/barrier interfaces in all samples. Scratch test showed that delamination occurred at the Cu/barrier interface and that the overall adhesion strength increased with increasing the nitrogen concentration. A good correlation was found between the measured adhesion strength and the composing phases in the barrier layer.

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