Residual stress relaxation of cubic boron nitride thin films deposited in Ar with other noble gases
2011 ◽
Vol 20
◽
pp. 012017
Keyword(s):
1997 ◽
Vol 6
(5-7)
◽
pp. 621-625
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2006 ◽
pp. 1316-1321
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1996 ◽
Vol 5
(11)
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pp. 1295-1302
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2007 ◽
Vol 40
(2)
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pp. 91-97
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2005 ◽
Vol 490-491
◽
pp. 213-217
1998 ◽
Vol 64
(1)
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pp. 109-115
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2010 ◽
Vol 25
(7)
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pp. 748-752
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2011 ◽
Vol 462-463
◽
pp. 1355-1360
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