Very low EOT and high oxidation state interfacial layer in Ge MOS devices

Author(s):  
Szu-Chun Yu ◽  
Kuei-Shu Chang-Liao ◽  
Mong-Chi Li ◽  
Wei-Fong Chi ◽  
Chen-Chien Li ◽  
...  
2014 ◽  
Author(s):  
C.H. Lin ◽  
K.S. Chang-Liao ◽  
C.C. Li ◽  
L.J. Liu ◽  
T.M. Lee

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