Simulation of a MEMS RF Filter
We simulate the motions in a MEMS bandpass Radio-Frequency (RF) filter. The filter model is obtained by discretizing the Lagrangian of the distributed-parameter system using a Galerkin procedure. The Euler-Lagrange equations are then used to obtain a two-degree-of-freedom model consisting of two non-linearly coupled ordinary-differential equations of motion. We use the model to study the transmission characteristics of a bandpass filter made up of two coupled resonators. Three distinct response regimes, separated by two critical amplification levels Vcr1 and Vcr2, are identified in the filter response. For amplification levels up to Vcr1, the pass signal is artifact free. Two types of artifacts due to the filter dynamics appear and distort the signal for amplification levels beyond Vcr1.