Optimized oxygen plasma etching of polyimide films for low loss optical waveguides

2002 ◽  
Vol 20 (5) ◽  
pp. 1587-1591 ◽  
Author(s):  
Navnit Agarwal ◽  
Shom Ponoth ◽  
Joel Plawsky ◽  
P. D. Persans
Keyword(s):  
Plasma Etching ◽  
Optical Waveguides ◽  
Oxygen Plasma ◽  
Polyimide Films ◽  
Low Loss ◽  
Oxygen Plasma Etching

Optimized Oxygen Plasma Etching of Polyurethane‐Based Electro‐optic Polymer for Low Loss Optical Waveguide Fabrication

1996 ◽  
Vol 143 (11) ◽  
pp. 3648-3651 ◽  
Author(s):  
Antao Chen ◽  
Kian Kaviani ◽  
Aron W. Rempel ◽  
Srinath Kalluri ◽  
William H. Steier ◽  
...  
Keyword(s):  
Optical Waveguide ◽  
Plasma Etching ◽  
Oxygen Plasma ◽  
Low Loss ◽  
Electro Optic ◽  
Oxygen Plasma Etching ◽  
Waveguide Fabrication

Oxygen plasma etching of silver-incorporated diamond-like carbon films

2009 ◽  
Vol 517 (19) ◽  
pp. 5739-5742 ◽  
Author(s):  
F.R. Marciano ◽  
L.F. Bonetti ◽  
R.S. Pessoa ◽  
M. Massi ◽  
L.V. Santos ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Oxygen Plasma ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Oxygen Plasma Etching

Effects of oxygen plasma etching on Sb2Te3 explored by torque detected quantum oscillations

2016 ◽  
Vol 108 (17) ◽  
pp. 172407
Author(s):  
Yuan Yan ◽  
Eric Heintze ◽  
Uwe S. Pracht ◽  
Marian Blankenhorn ◽  
Martin Dressel
Keyword(s):  
Plasma Etching ◽  
Oxygen Plasma ◽  
Quantum Oscillations ◽  
Oxygen Plasma Etching

Oxygen plasma etching of hydrocarbon-like polymers: Part I Modeling

2018 ◽  
Vol 15 (8) ◽  
pp. 1800038 ◽  
Author(s):  
Alexandre Bès ◽  
Min Koo ◽  
Thành L. Phan ◽  
Ana Lacoste ◽  
Jacques Pelletier
Keyword(s):  
Plasma Etching ◽  
Oxygen Plasma ◽  
Oxygen Plasma Etching

Oxygen plasma etching of YAG crystals

2018 ◽  
Author(s):  
Giedrius Abromavicius ◽  
Alexandr Belosludtsev ◽  
Naglis Kyžas
Keyword(s):  
Plasma Etching ◽  
Oxygen Plasma ◽  
Oxygen Plasma Etching
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