In situ chemical sensing in AlGaN∕GaN metal organic chemical vapor deposition process for precision film thickness metrology and real-time advanced process control
2005 ◽
Vol 23
(5)
◽
pp. 2007
◽
2007 ◽
Vol 8
(11)
◽
pp. 1719-1723
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1995 ◽
Vol 10
(9)
◽
pp. 2166-2169
◽
2000 ◽
Vol 51-52
◽
pp. 43-50
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1993 ◽
Vol 32
(Part 2, No. 10A)
◽
pp. L1380-L1382
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