Silicon wafer thickness measurement using terahertz time domain spectroscopy main

Author(s):  
Chih-Yu Jen ◽  
Christiaan Richter
Sensors ◽  
2021 ◽  
Vol 21 (16) ◽  
pp. 5389
Author(s):  
Kevin Kolpatzeck ◽  
Xuan Liu ◽  
Lars Häring ◽  
Jan C. Balzer ◽  
Andreas Czylwik

Terahertz time-domain spectroscopy systems driven by monolithic mode-locked laser diodes (MLLDs) exhibit bandwidths exceeding 1 THz and a peak dynamic range that can compete with other state-of-the-art systems. Their main difference compared to fiber-laser-driven systems is their ultra-high repetition rate of typically dozens of GHz. This makes them interesting for applications where the length of the terahertz path may not be precisely known and it enables the use of a very short and potentially fast optical delay unit. However, the phase accuracy of the system is limited by the accuracy with which the delay axes of subsequent measurements are synchronized. In this work, we utilize an all-fiber approach that uses the optical signal from the MLLD in a Mach–Zehnder interferometer to generate a reference signal that we use to synchronize the detected terahertz signals. We demonstrate transmission-mode thickness measurements of stacked layers of 17μm thick low-density polyethylene (LDPE) films.


2006 ◽  
Vol 100 (3) ◽  
pp. 033105 ◽  
Author(s):  
O. Morikawa ◽  
A. Quema ◽  
S. Nashima ◽  
H. Sumikura ◽  
T. Nagashima ◽  
...  

2021 ◽  
Vol 91 (2) ◽  
pp. 315
Author(s):  
А.Б. Сотский ◽  
М.М. Назаров ◽  
С.С. Михеев ◽  
Л.И. Сотская

Sensitivity of sensors of the composition of aqueous solutions in which it is detected the terahertz pulse reflected from the dielectric film – solution structure is investigated. It is shown that the maximum of the sensitivity is achieved by choosing the angles of incidence and radiation frequencies, providing zero reflection of monochromatic radiation from the named dissipative structure. Conditions for the realization of such reflection for waves of s- and p-polarization are established. Calculations are confirmed experimentally for the sensor of glucose concentration in water, which uses a thin silicon wafer, separating solution from air. It is shown that with the use of the terahertz time-domain spectroscopy method the sensor of the proposed structure allows reliable to detect and distinguich glucose impurities of concentration 10 and 30 g / l.


2009 ◽  
Vol 48 (33) ◽  
pp. 6541 ◽  
Author(s):  
Payam Mousavi ◽  
Frank Haran ◽  
David Jez ◽  
Fadil Santosa ◽  
John Steven Dodge

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