Design and characteristic analysis of an aerostatic decoupling table for microelectronic packaging

2017 ◽  
Vol 232 (6) ◽  
pp. 1079-1090 ◽  
Author(s):  
Cunman Liang ◽  
Fujun Wang ◽  
Qingguo Yang ◽  
Yanling Tian ◽  
Xingyu Zhao ◽  
...  
Keyword(s):  
High Precision ◽  
Optimization Design ◽  
Micro Electro Mechanical System ◽  
Navier Stokes ◽  
Orifice Diameter ◽  
Precision Positioning ◽  
Characteristic Analysis ◽  
Navier Stokes Equation ◽  
Decoupling Mechanism ◽  
Aerostatic Bearings

This paper presents a novel 2-DOF XY table with high-precision positioning to improve the efficiency and precision of micro-electro-mechanical system packaging. The XY table, which is supported by aerostatic bearings to realize high-precision positioning motion, is directly driven by two linear voice coil actuators. The motion decoupling between the X-and Y-axes is realized through a novel aerostatic decoupling mechanism, by which the mass and inertia of motion parts are reduced significantly. The mechanical structure of the XY table is designed and the decoupling mechanism is studied. Based on the Navier–Stokes equation, the influences of orifice diameter and lubrication gap on the carrying capacity as well the static stiffness of the aerostatic bearings are analyzed. The parameters of the aerostatic bearings are determined by single factor method. Using the finite element method, the static, modal, and transient analyses of the developed positioning table are carried out to investigate the characteristics of the positioning table. The results show that the positioning table provides good performance and can also provide important information for the optimization design and control of this kind of the positioning table.

Design and control of a high-acceleration precision positioning system using a novel flexible decoupling mechanism

2010 ◽  
Vol 224 (2) ◽  
pp. 431-442 ◽  
Author(s):  
F Wang ◽  
X Zhao ◽  
D Zhang ◽  
Y Wu ◽  
B Shirinzadeh ◽  
...  
Keyword(s):  
Dynamic Analysis ◽  
Experimental Tests ◽  
Micro Electro Mechanical System ◽  
Positioning System ◽  
Precision Positioning ◽  
Coupled Models ◽  
Mems Packaging ◽  
Flexure Hinges ◽  
High Acceleration ◽  
Decoupling Mechanism

This article presents a high-acceleration precision positioning system to improve the efficiency and precision of micro-electro-mechanical system (MEMS) packaging. The positioning system is direct driven by linear voice coil actuators (LVCAs), and the mass and inertia of the motion system are significantly reduced by using a novel flexible decoupling mechanism based on flexure hinges. The decoupling principle of the mechanism is introduced, and the flexure hinges are designed by using an analytical method. Through dynamic analysis, the stiffness and preload of the spring are determined. With the aid of finite-element method and dynamic analysis, the influences of flexure hinges on the characteristics of the positioning system are investigated. Based on the dynamic characteristics of LVCA and the developed mechanism structure, the electromechanical coupled models are established. Minimum deadbeat response control strategy with a pre-filter is implemented to control the positioning system, and the parameters of the controller are optimized. Experimental tests are carried out to examine the characteristics of the positioning system. The results show that the positioning system provides good performances and satisfies the requirements of MEMS packaging operations.

Thermal Characteristic Analysis on the Headstock of a High Precision CNC Machine Tool

2012 ◽  
Vol 201-202 ◽  
pp. 157-161
Author(s):  
Yao Man Zhang ◽  
Jia Liang Han ◽  
Ren Jun Gu
Keyword(s):  
Machine Tool ◽  
High Precision ◽  
Optimization Design ◽  
Thermal Characteristic ◽  
Spindle Assembly ◽  
Cnc Machine ◽  
Analysis Model ◽  
Characteristic Analysis ◽  
Element Analysis ◽  
Precision Machine

The performances of the precision machine tool will be influenced by its thermal characteristics seriously, and accurately predict the thermal characteristic of the key component of the machine tool is helpful to improve the design level. The headstock of a high precision CNC lathes has been regarded as the research objects, and the thermal properties and its influence on the performance of the machine tool are studied. Finite element analysis model of the headstock has been constructed, and the simulation calculations of the steady temperature field distribution and thermal equilibrium time of the headstock are calculated, and then the analysis to identify the thermal deformation trends of the spindle assembly and the heat distortion of the headstock are also been done. Some of the key factors that have significant influence on the thermal characteristic of the high precision machine tools are also studied. The analysis reveals that the performances of the machine tool will be influenced by the hot asymmetric, the study lays a foundation for the optimization design and thermal error compensation of the spindle assembly.

High-Precision Positioning of Galvano Scanners by Structural Design Using Node of Vibration Modes

2011 ◽  
Vol 131 (3) ◽  
pp. 275-282
Author(s):  
Kenta Seki ◽  
Hiroaki Matsuura ◽  
Makoto Iwasaki ◽  
Hiromu Hirai ◽  
Soichi Tohyama
Keyword(s):  
High Precision ◽  
Structural Design ◽  
Vibration Modes ◽  
Precision Positioning

Static and Dynamic Characteristic Analysis of the Tower for Vertical Axis Wind Turbine Based on Finite Element Method

2012 ◽  
Vol 229-231 ◽  
pp. 613-616
Author(s):  
Yan Jue Gong ◽  
Yuan Yuan Zhang ◽  
Fu Zhao ◽  
Hui Yu Xiang ◽  
Chun Ling Meng ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Wind Turbine ◽  
Dynamic Characteristic ◽  
Optimization Design ◽  
Vertical Axis ◽  
Vertical Axis Wind Turbine ◽  
Characteristic Analysis ◽  
Support Structure ◽  
Element Method

As an important part of the vertical axis wind turbine, the support structure should have high strength and stiffness. This article adopts finite element method to model a kind of tower structure of the vertical axis wind turbine and carry out static and modal analysis. The static and dynamic characteristic results of tower in this paper provide reference for optimization design the support structure of wind turbine further.

scholarly journals An Incompressible Polymer Fluid Interacting with a Koiter Shell

2021 ◽  
Vol 31 (1) ◽  
Author(s):  
Dominic Breit ◽  
Prince Romeo Mensah
Keyword(s):  
Moving Boundary ◽  
Classical Model ◽  
Elastic Shell ◽  
Planck Equation ◽  
Navier Stokes ◽  
Flexible Shell ◽  
Navier Stokes Equation ◽  
Shell System ◽  
Forward Equation ◽  
Polymer Fluid

AbstractWe study a mutually coupled mesoscopic-macroscopic-shell system of equations modeling a dilute incompressible polymer fluid which is evolving and interacting with a flexible shell of Koiter type. The polymer constitutes a solvent-solute mixture where the solvent is modelled on the macroscopic scale by the incompressible Navier–Stokes equation and the solute is modelled on the mesoscopic scale by a Fokker–Planck equation (Kolmogorov forward equation) for the probability density function of the bead-spring polymer chain configuration. This mixture interacts with a nonlinear elastic shell which serves as a moving boundary of the physical spatial domain of the polymer fluid. We use the classical model by Koiter to describe the shell movement which yields a fully nonlinear fourth order hyperbolic equation. Our main result is the existence of a weak solution to the underlying system which exists until the Koiter energy degenerates or the flexible shell approaches a self-intersection.

scholarly journals Effects of Salt Tracer Volume and Concentration on Residence Time Distribution Curves for Characterization of Liquid Steel Behavior in Metallurgical Tundish

Metals ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 430
Author(s):  
Changyou Ding ◽  
Hong Lei ◽  
Hong Niu ◽  
Han Zhang ◽  
Bin Yang ◽  
...  
Keyword(s):  
Residence Time ◽  
Time Distribution ◽  
Residence Time Distribution ◽  
Mass Concentration ◽  
Distribution Curve ◽  
Navier Stokes ◽  
Navier Stokes Equation ◽  
Residence Time Distribution Curve ◽  
Tracer Solution ◽  
Time Distribution Curve

The residence time distribution (RTD) curve is widely applied to describe the fluid flow in a tundish, different tracer mass concentrations and different tracer volumes give different residence time distribution curves for the same flow field. Thus, it is necessary to have a deep insight into the effects of the mass concentration and the volume of tracer solution on the residence time distribution curve. In order to describe the interaction between the tracer and the fluid, solute buoyancy is considered in the Navier–Stokes equation. Numerical results show that, with the increase of the mass concentration and the volume of the tracer, the shape of the residence time distribution curve changes from single flat peak to single sharp peak and then to double peaks. This change comes from the stratified flow of the tracer. Furthermore, the velocity difference number is introduced to demonstrate the importance of the density difference between the tracer and the fluid.

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