LTE Conditions within the Central Channel of the Plasma

1989 ◽  
Vol 43 (8) ◽  
pp. 1385-1387 ◽  
Author(s):  
Thomas R. Smith ◽  
M. Bonner Denton
Keyword(s):  
Thermodynamic Equilibrium ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Local Thermodynamic Equilibrium ◽  
Magnesium Ion ◽  
Central Channel ◽  
Electron Densities ◽  
Inductively Coupled ◽  
Excitation Conditions

Studies were performed on the effect of torch pressure on the excitation conditions within an inductively coupled plasma (ICP). Experimentally measured magnesium ion-to-atom ratios and electron densities were used to determine the deviation of the plasma from local thermodynamic equilibrium (LTE) conditions. Results of these studies indicate that the plasma is in an infrathermal state when operated at atmospheric pressure, and excitation conditions within the central channel of an ICP shift towards LTE conditions as torch pressure is increased.

Excitation Temperature in High-Power Nitrogen Microwave-Induced Plasma at Atmospheric Pressure

1997 ◽  
Vol 51 (10) ◽  
pp. 1496-1499 ◽  
Author(s):  
Kenichi Ogura ◽  
Hirofumi Yamada ◽  
Yoshitaka Sato ◽  
Yukio Okamoto
Keyword(s):  
Electron Density ◽  
High Power ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Local Thermodynamic Equilibrium ◽  
Rotational Temperature ◽  
Nitrogen Plasma ◽  
Excitation Temperature ◽  
Inductively Coupled ◽  
Microwave Induced Plasma

Excitation temperature, rotational temperature, and electron density were obtained for a high-power (1-kW) microwave-induced nitrogen plasma (N2 MIP) at atmospheric pressure generated by an Okamoto cavity. With 1 kW input microwave power, an excitation temperature of 5500 K, a rotational temperature of 5000 K, and an electron density in the 1013 range were measured. Excitation and rotational temperatures were much closer than is the case with the commonly used argon inductively coupled plasma, suggesting that this N2 MIP is closer to local thermodynamic equilibrium (thermal).

scholarly journals Computational Fluid Dynamics (CFD) Simulations and Experimental Measurements in an Inductively-Coupled Plasma Generator Operating at Atmospheric Pressure: Performance Analysis and Parametric Study

Processes ◽  
2019 ◽  
Vol 7 (3) ◽  
pp. 133 ◽  
Author(s):  
Sangeeta Punjabi ◽  
Dilip Barve ◽  
Narendra Joshi ◽  
Asoka Das ◽  
Dushyant Kothari ◽  
...  
Keyword(s):  
Fluid Dynamics ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Gas Flow ◽  
Rf Power ◽  
Gas Flow Rate ◽  
Inductively Coupled ◽  
Plasma Resistance ◽  
Computational Fluid Dynamics Cfd ◽  
Icp Torch

In this article, electrical characteristics of a high-power inductively-coupled plasma (ICP) torch operating at 3 MHz are determined by direct measurement of radio-frequency (RF) current and voltage together with energy balance in the system. The variation of impedance with two parameters, namely the input power and the sheath gas flow rate for a 50 kW ICP is studied. The ICP torch system is operated at near atmospheric pressure with argon as plasma gas. It is observed that the plasma resistance increases with an increase in the RF-power. Further, the torch inductance decreases with an increase in the RF-power. In addition, plasma resistance and torch inductance decrease with an increase in the sheath gas flow rate. The oscillator efficiency of the ICP system ranges from 40% to 80% with the variation of the Direct current (DC) powers. ICP has also been numerically simulated using Computational Fluid Dynamics (CFD) to predict the impedance profile. A good agreement was found between the CFD predictions and the impedance experimental data published in the literature.

scholarly journals Optical Diagnostics for a High.Power, RF-Inductively Coupled Plasma

1988 ◽  
Vol 117 ◽  
Author(s):  
N. S. Nogar ◽  
G. L. Keaton ◽  
J. E. Anderson ◽  
M. Trkula
Keyword(s):  
Flow Rate ◽  
Inductively Coupled Plasma ◽  
Emission Spectroscopy ◽  
Local Thermodynamic Equilibrium ◽  
Laser Induced Fluorescence ◽  
Rf Power ◽  
Inductively Coupled ◽  
Spatially Resolved ◽  
Hull Design ◽  
Ar Gas

AbstractEmission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design 1 inductively coupled plasma. This plasma is used for a variety of syntheses 2,3 including SiC, TiC, BN, AlN and diamond. Temporallyand spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.

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