scholarly journals Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined With DC Discharge

2021 ◽  
Vol 17 (4) ◽  
pp. 33-43
Author(s):  
Yurii Kovtun ◽  
Gennadiy Glazunov ◽  
Vladimir Moiseenko ◽  
Sergiy Maznichenko ◽  
Mikhaylo Bondarenko ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Glow Discharge ◽  
Radio Frequency ◽  
Vacuum Chamber ◽  
Rf Discharge ◽  
Rf Plasma ◽  
Steel 12Kh18n10t ◽  
Basic Part ◽  
Surface Conditioning ◽  
Dc Discharge

Introduction. It is important to decrease light and heavy impurities influxes towards the plasma volume during the high temperature plasma experiments in fusion devices. This is why the conditioning of the wall inner vacuumsurfaces is a basic part of the fusion device operation.Problem Statement. The conventional inner vacuum chamber surface conditioning methods has a significant drawback: sputtering materials in a vacuum chamber. The inner vacuum surfaces can be also conditioned with radio-frequency (RF) discharge plasma, but the conditioning effectiveness is limited by low ion energy.Purpose. The purpose of this research is to develop vacuum surface conditioning technology by the radio frequency plasma combined with DC discharge. Materials and Methods. The noncontact passive method of optical plasma spectroscopy has been used to estimate ion plasma composition. The stainless steel outgassing has been determined in situ with the thermodesorption probe method. The sputtering of the samples has been measured with the weight loss method.Results. The studies of combined discharge have shown that: the anode voltage of combined discharge is lower than in case of the glow discharge; the stainless steel 12Kh18N10T erosion coefficient is about 1.5 times less in thecase of combined discharge than in the glow one; the thermal desorption diagnostic of wall conditions in the DSM-1 has shown better efficiency with the combined discharge as compared with the glow discharge. Theproposed technology is an original one and has no analogs.Conclusions. The reported research results have shown good prospects for the combined discharge usage for plasma walls conditioning and opportunities for using the combined discharge technology for big fusion machines.

scholarly journals Implantation and replacement of hydrogen isotopes at 304 stainless steel vacuum wall under RF discharge and RF-DC glow discharge.

Shinku ◽  
1986 ◽  
Vol 29 (3) ◽  
pp. 160-169
Author(s):  
Kenya AKAISHI ◽  
Yusuke KUBOTA ◽  
Akira URITANI ◽  
Yoichiro HORI
Keyword(s):  
Stainless Steel ◽  
Glow Discharge ◽  
Hydrogen Isotopes ◽  
304 Stainless Steel ◽  
Rf Discharge ◽  
Dc Glow Discharge

Modification of wood by radio-frequency discharge plasma

2019 ◽  
Vol 105 ◽  
pp. 85-90
Author(s):  
IGOR NOVÁK ◽  
JÁN SEDLIAČIK ◽  
IVAN CHODÁK ◽  
MATEJ MIČUŠÍK ◽  
JAN MATYAŠOVSKÝ ◽  
...  
Keyword(s):  
Radio Frequency ◽  
High Efficiency ◽  
Discharge Plasma ◽  
Aging Effect ◽  
Rf Discharge ◽  
Rf Plasma ◽  
Adhesive Properties ◽  
Temperature Plasma ◽  
Pre Treatment ◽  
Radio Frequency Discharge

Modification of wood by radio-frequency discharge plasma. Low-temperature plasma was used to improve the surface and adhesive properties of wood. The pre-treatment of wood surfaces using radio-frequency (RF) discharge plasma is attractive for various wood applications, mainly because of the high efficiency and low production cost of the process. The treatment of wood by RF plasma exhibited an aging effect, with the modified surface never recovering its initial hydrophobic state. The contact angle of water decreased with the activation time of the RF plasma treatment.

scholarly journals VACUUM-PLASMA PROPERTIES OF STAINLESS STEEL AFTER IMPACT OF COMBINED GLOW-MICROWAVE DISCHARGES IN ARGON ATMOSPHERE

2021 ◽  
pp. 50-56
Author(s):  
G.P. Glazunov ◽  
V.E. Moiseenko ◽  
S.M. Maznichenko ◽  
M.N. Bondarenko ◽  
A.L. Konotopskiy ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Glow Discharge ◽  
Vacuum Chamber ◽  
Microwave Plasma ◽  
Initial Conditions ◽  
Argon Atmosphere ◽  
Chamber Wall ◽  
Vacuum Plasma ◽  
Glow Discharges ◽  
Outgassing Rate

The experiments were carried out to determine the vacuum-plasma characteristics (mainly erosion and outgassing rate in a vacuum) of the stainless steel 12X18H10T before and after processing the walls of the vacuum chamber with the glow discharge and combined, glow-microwave plasma discharges in argon atmosphere. The current-voltage characteristics, the electron density and electron temperature were measured. It was observed that the discharge voltage in the combined regime is significantly lower than in glow discharges. In some modes, this voltage decrease can be up to 200 V. It was shown that erosion of stainless steel 12X18H10T in the combined discharges is 70 %, less than in the glow discharges. Measurements were made of the outgassing rate of 12X18H10T stainless steel with the thermal desorption probe in situ in the DSM-1 vacuum chamber. It was shown that cleaning the chamber wall by the glow discharge during 5 h leads to a decrease in the outgassing rate from 5.5·10-5 to 1·10-5 (Torr.l)/(s.cm2) . When the chamber wall is treated with GM discharge starting from nearly the same initial conditions the outgassing rate decreased to 3·10-6 (Torr.l)/(s.cm2). Spectral measurements of the plasma radiation of a glow and combined discharges show a decrease in the ratio of the peaks of argon ions and neutrals during the transition from a glow discharge to a combined one.

Surface conditioning of stainless steel coupons with skim milk, buttermilk, and butter serum solutions and its effect on bacterial adherence

Food Control ◽  
2014 ◽  
Vol 42 ◽  
pp. 94-100 ◽  
Author(s):  
Nguyen Manh Dat ◽  
Le Duc Manh ◽  
Daisuke Hamanaka ◽  
Duong Van Hung ◽  
Fumihiko Tanaka ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Skim Milk ◽  
Bacterial Adherence ◽  
Surface Conditioning

Ion Kinetic Energy Determinations in Radio-Frequency Glow Discharge Mass Spectrometry

1995 ◽  
Vol 49 (7) ◽  
pp. 917-926 ◽  
Author(s):  
Paula R. Cable ◽  
R. Kenneth Marcus
Keyword(s):  
Kinetic Energy ◽  
Glow Discharge ◽  
Radio Frequency ◽  
Source Region ◽  
Potential Method ◽  
Operating Conditions ◽  
Atmospheric Plasma ◽  
Radio Frequency Glow Discharge ◽  
Ion Trajectory ◽  
Ion Kinetic Energy

Radio-frequency glow discharge (rf-GD) sources produce an abundance of both atoms and ions. For the mass spectrometric application of the glow discharge technique, knowledge of the ion kinetic energies is required to optimize extraction and focusing of ions from the source region into the analyzer. This paper details kinetic energies experimentally determined with the use of the “retarding potential” method. For this study, the analyzer quadrupole of a double-quadrupole mass spectrometer was positively biased to act as a repeller. Ion kinetic energies (IKEs) determined for a variety of discharge and analyzer operating conditions ranged from 12.5 eV to 25.0 eV for 63Cu+. Kinetic energy measurements were confirmed from ion trajectory simulations and follow closely the experimental values for identical analyzer conditions and initial IKEs. Results of this study indicate that the conditions under which ions are formed (plasma conditions) affect IKEs and energy spreads to a greater extent than analyzer parameter variations. Different from atmospheric plasma sources, IKEs for rf-GD species do not vary as a function of ion mass/identity. Evidence is also given in support of a slight mass biasing owing to the transmission properties of double-quadrupole analyzers. The findings detailed herein demonstrate the effects of rf modulation on both ion kinetic energy values and distributions.

Effect of RF plasma nitriding time on microhardness and corrosion resistance of 304 stainless steel

1992 ◽  
Vol 59 (3-4) ◽  
pp. 253-260 ◽  
Author(s):  
M.M. Ibrahim ◽  
F.M. El-Hossary ◽  
N.Z. Negm ◽  
M. Abed ◽  
R.E. Ricker
Keyword(s):  
Stainless Steel ◽  
Corrosion Resistance ◽  
Plasma Nitriding ◽  
304 Stainless Steel ◽  
Rf Plasma ◽  
Nitriding Time

scholarly journals Uses of radio emission spectroscopy for non-contact and in situ diagnostics of low pressure radio frequency plasma processing

2021 ◽  
Author(s):  
Rajani K. Vijayaraghavan ◽  
Sean Kelly ◽  
David Coates ◽  
Cezar Gaman ◽  
Niall MacGearailt ◽  
...  
Keyword(s):  
Radio Emission ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Near Field ◽  
Plasma Processing ◽  
Diagnostic Technique ◽  
Primary Source ◽  
Low Pressure ◽  
Chamber Pressure ◽  
Rf Plasma

Abstract We demonstrate that a passive non-contact diagnostic technique, radio emission spectroscopy (RES), provides a sensitive monitor of currents in a low pressure radio frequency (RF) plasma. A near field magnetic loop antenna was used to capture RF emissions from the plasma without perturbing it. The analysis was implemented for a capacitively coupled RF plasma with an RF supply at a frequency of 13.56 MHz. Real-time measurements are captured in scenarios relevant to contemporary challenges faced during semiconductor fabrication (e.g. window coating and wall disturbance). Exploration of the technique for key equipment parameters including applied RF power, chamber pressure, RF bias frequencies and chamber wall cleanliness shows sensitive and repeatable function. In particular, the induced RES signal was found to vary sensitively to pressure changes and we were able to detect pressure and power variations as low as ~2.5 %/mtorr and ~3.5 %/watt, respectively, during the plasma processing during a trial generic plasma process. Finally, we explored the ability of RES to monitor the operation of a multiple frequency low-pressure RF plasma system (f1 = 2 MHz, f2 = 162 MHz) and intermixing products which suggests strongly that the plasma sheaths are the primary source of this non-linear diode mixing effect.

scholarly journals HELIUM RELEASE FROM 12Cr18Ni10Ti STAINLESS STEEL AFTER IMPACT OF STEADY STATE GLOW DISCHARGE He PLASMA

2021 ◽  
pp. 32-36
Author(s):  
G.P. Glazunov ◽  
M.N. Bondarenko ◽  
A.L. Konotopskiy ◽  
I.E. Garkusha ◽  
S.M. Maznichenko ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Steady State ◽  
Glow Discharge ◽  
Thermal Desorption ◽  
Gas Discharge ◽  
Plasma Pressure ◽  
Discharge Voltage ◽  
Probe Surface ◽  
Physical Mechanisms ◽  
He Atom

The thermal desorption experiments were carried out to study the process of helium outgassing from the stainless steel 12Cr18Ni10Ti after exposure to a steady state glow discharge (GD) plasma in He atmosphere. The currentvoltage characteristics in different plasma regimes have been measured and estimation of He ions energy has been made. Measurements of He release from the stainless steel probes showed the saturation of probe surface with He after the fluencies of ~ 4 ∙ 1019 ion/cm2. The value of He outgassing strongly depends on the regime of GD plasma: pressure of work gas, discharge voltage, etc. Several maximums, including the maximum at the temperature of 100…150 °C, were registered in the He desorption curves that indicated different He atom states on the surface and in the nearest surface bulk. Physical mechanisms of such He outgassing are discussed.

Sign in / Sign up

Export Citation Format

Share Document